Properties of Nickel Films Prepared by R.F. Sputtering and Interdiffusion Analysis of Ta2N–Ni Films
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| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Wiley
1980-01-01
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| Series: | Active and Passive Electronic Components |
| Online Access: | http://dx.doi.org/10.1155/APEC.7.159 |
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| _version_ | 1832551816629321728 |
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| author | G. Morillot A. Huber S. Abdin C. Val |
| author_facet | G. Morillot A. Huber S. Abdin C. Val |
| author_sort | G. Morillot |
| collection | DOAJ |
| format | Article |
| id | doaj-art-7e2d4ae20a5a4b1d8e336c3d60a3b47a |
| institution | Kabale University |
| issn | 0882-7516 1563-5031 |
| language | English |
| publishDate | 1980-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | Active and Passive Electronic Components |
| spelling | doaj-art-7e2d4ae20a5a4b1d8e336c3d60a3b47a2025-02-03T06:00:21ZengWileyActive and Passive Electronic Components0882-75161563-50311980-01-0171-315916210.1155/APEC.7.159Properties of Nickel Films Prepared by R.F. Sputtering and Interdiffusion Analysis of Ta2N–Ni FilmsG. MorillotA. HuberS. AbdinC. Valhttp://dx.doi.org/10.1155/APEC.7.159 |
| spellingShingle | G. Morillot A. Huber S. Abdin C. Val Properties of Nickel Films Prepared by R.F. Sputtering and Interdiffusion Analysis of Ta2N–Ni Films Active and Passive Electronic Components |
| title | Properties of Nickel Films Prepared by R.F. Sputtering and Interdiffusion Analysis of Ta2N–Ni Films |
| title_full | Properties of Nickel Films Prepared by R.F. Sputtering and Interdiffusion Analysis of Ta2N–Ni Films |
| title_fullStr | Properties of Nickel Films Prepared by R.F. Sputtering and Interdiffusion Analysis of Ta2N–Ni Films |
| title_full_unstemmed | Properties of Nickel Films Prepared by R.F. Sputtering and Interdiffusion Analysis of Ta2N–Ni Films |
| title_short | Properties of Nickel Films Prepared by R.F. Sputtering and Interdiffusion Analysis of Ta2N–Ni Films |
| title_sort | properties of nickel films prepared by r f sputtering and interdiffusion analysis of ta2n 8211 ni films |
| url | http://dx.doi.org/10.1155/APEC.7.159 |
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