Degenerate GaN source–drain AlN/AlxGa1−xN/AlN high electron mobility transistors with a high breakdown electric field reaching 6.0 MV/cm

This study presents a comprehensive analysis of the structural and electrical properties of degenerate GaN source–drain AlN/AlxGa1−xN/AlN high electron mobility transistors (HEMTs) fabricated using low-temperature pulsed sputtering epitaxial growth. The investigation encompassed a range of Al compos...

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Bibliographic Details
Main Authors: Kohei Ueno, Ryota Maeda, Takao Kozaka, Hiroshi Fujioka
Format: Article
Language:English
Published: AIP Publishing LLC 2025-04-01
Series:APL Materials
Online Access:http://dx.doi.org/10.1063/5.0249739
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