Multiphysical model of CMUT array based on modal decomposition and the Rayleigh integral
There is a high number of modeling techniques for calculation of characteristics of capacitive micromachined ultrasound transducers. Very few of them are capable of calculation of the acoustic field, especially when the number of cells in the array is huge. Implementation of an approach based on sup...
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Elsevier
2025-06-01
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| Series: | Sensing and Bio-Sensing Research |
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| Online Access: | http://www.sciencedirect.com/science/article/pii/S2214180425000509 |
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| author | A.E. Biriukov A.M. Korsunsky |
| author_facet | A.E. Biriukov A.M. Korsunsky |
| author_sort | A.E. Biriukov |
| collection | DOAJ |
| description | There is a high number of modeling techniques for calculation of characteristics of capacitive micromachined ultrasound transducers. Very few of them are capable of calculation of the acoustic field, especially when the number of cells in the array is huge. Implementation of an approach based on superposition of modes and the Rayleigh integral is suggested. A computer model, utilizing this approach, also includes other methods for calculation of related parameters. A mass-spring-damper model is used to determine the lumped parameters and influence of the softening effect. Solution to a thin plate equation gives eigenfrequencies and eigenmodes used to find the membrane's response to an arbitrary excitation. For accurate evaluation of an acoustic field, the model discretizes normal velocity on a surface of the array. The array supports simple generation with individual phase shifts between the cells. The model is parametrized and adapted for an interface with user. An example object with specified physical and geometrical parameters is given. The key mechanical and acoustical characteristics are presented for the provided example object with a detailed description for their calculation. The model is verified by comparison to FEM within these characteristics. An acoustical study is conducted for an array with 4 example cells for two cases of phase shifts. The effectiveness of the proposed method in comparison with FEA is provided: in terms of time for following studies: lumped parameters, eigenvalues, frequency response (mechanical and acoustical) and radiation pattern; in terms of accuracy for a parametric lumped parameters study. |
| format | Article |
| id | doaj-art-7d2e9a9461a446cab34808fe06d4487f |
| institution | OA Journals |
| issn | 2214-1804 |
| language | English |
| publishDate | 2025-06-01 |
| publisher | Elsevier |
| record_format | Article |
| series | Sensing and Bio-Sensing Research |
| spelling | doaj-art-7d2e9a9461a446cab34808fe06d4487f2025-08-20T02:07:40ZengElsevierSensing and Bio-Sensing Research2214-18042025-06-014810078410.1016/j.sbsr.2025.100784Multiphysical model of CMUT array based on modal decomposition and the Rayleigh integralA.E. Biriukov0A.M. Korsunsky1Corresponding author.; Hierarchically Structured Materials (HSM) Laboratory, Center for Energy Science and Technology (CEST), Skolkovo Institute of Science and Technology, Bolshoy Boulevard 30, Bld. 1, Moscow 121205, RussiaHierarchically Structured Materials (HSM) Laboratory, Center for Energy Science and Technology (CEST), Skolkovo Institute of Science and Technology, Bolshoy Boulevard 30, Bld. 1, Moscow 121205, RussiaThere is a high number of modeling techniques for calculation of characteristics of capacitive micromachined ultrasound transducers. Very few of them are capable of calculation of the acoustic field, especially when the number of cells in the array is huge. Implementation of an approach based on superposition of modes and the Rayleigh integral is suggested. A computer model, utilizing this approach, also includes other methods for calculation of related parameters. A mass-spring-damper model is used to determine the lumped parameters and influence of the softening effect. Solution to a thin plate equation gives eigenfrequencies and eigenmodes used to find the membrane's response to an arbitrary excitation. For accurate evaluation of an acoustic field, the model discretizes normal velocity on a surface of the array. The array supports simple generation with individual phase shifts between the cells. The model is parametrized and adapted for an interface with user. An example object with specified physical and geometrical parameters is given. The key mechanical and acoustical characteristics are presented for the provided example object with a detailed description for their calculation. The model is verified by comparison to FEM within these characteristics. An acoustical study is conducted for an array with 4 example cells for two cases of phase shifts. The effectiveness of the proposed method in comparison with FEA is provided: in terms of time for following studies: lumped parameters, eigenvalues, frequency response (mechanical and acoustical) and radiation pattern; in terms of accuracy for a parametric lumped parameters study.http://www.sciencedirect.com/science/article/pii/S2214180425000509CMUTMicroelectromechanical systems (MEMS)Modal superpositionThe Rayleigh integralCircular plate |
| spellingShingle | A.E. Biriukov A.M. Korsunsky Multiphysical model of CMUT array based on modal decomposition and the Rayleigh integral Sensing and Bio-Sensing Research CMUT Microelectromechanical systems (MEMS) Modal superposition The Rayleigh integral Circular plate |
| title | Multiphysical model of CMUT array based on modal decomposition and the Rayleigh integral |
| title_full | Multiphysical model of CMUT array based on modal decomposition and the Rayleigh integral |
| title_fullStr | Multiphysical model of CMUT array based on modal decomposition and the Rayleigh integral |
| title_full_unstemmed | Multiphysical model of CMUT array based on modal decomposition and the Rayleigh integral |
| title_short | Multiphysical model of CMUT array based on modal decomposition and the Rayleigh integral |
| title_sort | multiphysical model of cmut array based on modal decomposition and the rayleigh integral |
| topic | CMUT Microelectromechanical systems (MEMS) Modal superposition The Rayleigh integral Circular plate |
| url | http://www.sciencedirect.com/science/article/pii/S2214180425000509 |
| work_keys_str_mv | AT aebiriukov multiphysicalmodelofcmutarraybasedonmodaldecompositionandtherayleighintegral AT amkorsunsky multiphysicalmodelofcmutarraybasedonmodaldecompositionandtherayleighintegral |