Solution Processed AZO Thin Films Prepared from Different Source Materials
Aluminum doped Zinc Oxide films were spin-coated from 1 mol% doped precursors obtained from different source materials optimizing post-deposition annealing in controlled atmospheres. AZO films were provided with pre-deposition heating at 500 °C in ambient while post-deposition rapid thermal annealin...
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| Format: | Article |
| Language: | English |
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Sumy State University
2017-06-01
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| Series: | Журнал нано- та електронної фізики |
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| Online Access: | http://jnep.sumdu.edu.ua:8080/download/numbers/2017/3/articles/jnep_V9_03010.pdf |
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| author | Sana Ullah Fabio De Matteis Massimiliano Lucci Ivan Davoli |
| author_facet | Sana Ullah Fabio De Matteis Massimiliano Lucci Ivan Davoli |
| author_sort | Sana Ullah |
| collection | DOAJ |
| description | Aluminum doped Zinc Oxide films were spin-coated from 1 mol% doped precursors obtained from different source materials optimizing post-deposition annealing in controlled atmospheres. AZO films were provided with pre-deposition heating at 500 °C in ambient while post-deposition rapid thermal annealing (RTA) in vacuum and in N2-5%H2 was provided at 400, 500 and 600 °C. Dominant ZnO c-axis oriented AZO films with typical wurtzite crystal structure were obtained. Aluminum nitrate source materials resulted in comparatively higher conductivity AZO films. We conclude post-deposition annealing in controlled environments helped increase oxygen vacancies and enhanced grain growth and crystallinity resulting in increased conductivity. Optical measurements showed an average total transmittance (%T) of about 85 % in the visible for all the films with a direct allowed band gap of about 3.2. |
| format | Article |
| id | doaj-art-7d26148dc03044e8a440e34871d45c95 |
| institution | DOAJ |
| issn | 2077-6772 |
| language | English |
| publishDate | 2017-06-01 |
| publisher | Sumy State University |
| record_format | Article |
| series | Журнал нано- та електронної фізики |
| spelling | doaj-art-7d26148dc03044e8a440e34871d45c952025-08-20T03:07:04ZengSumy State UniversityЖурнал нано- та електронної фізики2077-67722017-06-019303010-103010-410.21272/jnep.9(3).03010Solution Processed AZO Thin Films Prepared from Different Source MaterialsSana Ullah0Fabio De Matteis1Massimiliano Lucci2Ivan Davoli3Dipartimento di Ingegneria Industriale, Università degli Studi di Roma “Tor Vergata”, Via del Politecnico, 1, 00133, Roma, ItalyDipartimento di Ingegneria Industriale, Università degli Studi di Roma “Tor Vergata”, Via del Politecnico, 1, 00133, Roma, ItalyDipartimento di Fisica, Università degli Studi di Roma “Tor Vergata”, Via della Ricerca Scientifica, 1, 00133, Roma, ItalyDipartimento di Fisica, Università degli Studi di Roma “Tor Vergata”, Via della Ricerca Scientifica, 1, 00133, Roma, ItalyAluminum doped Zinc Oxide films were spin-coated from 1 mol% doped precursors obtained from different source materials optimizing post-deposition annealing in controlled atmospheres. AZO films were provided with pre-deposition heating at 500 °C in ambient while post-deposition rapid thermal annealing (RTA) in vacuum and in N2-5%H2 was provided at 400, 500 and 600 °C. Dominant ZnO c-axis oriented AZO films with typical wurtzite crystal structure were obtained. Aluminum nitrate source materials resulted in comparatively higher conductivity AZO films. We conclude post-deposition annealing in controlled environments helped increase oxygen vacancies and enhanced grain growth and crystallinity resulting in increased conductivity. Optical measurements showed an average total transmittance (%T) of about 85 % in the visible for all the films with a direct allowed band gap of about 3.2.http://jnep.sumdu.edu.ua:8080/download/numbers/2017/3/articles/jnep_V9_03010.pdfAZOSolution synthesisSpin coatingRapid thermal annealingTransparent conducting oxide |
| spellingShingle | Sana Ullah Fabio De Matteis Massimiliano Lucci Ivan Davoli Solution Processed AZO Thin Films Prepared from Different Source Materials Журнал нано- та електронної фізики AZO Solution synthesis Spin coating Rapid thermal annealing Transparent conducting oxide |
| title | Solution Processed AZO Thin Films Prepared from Different Source Materials |
| title_full | Solution Processed AZO Thin Films Prepared from Different Source Materials |
| title_fullStr | Solution Processed AZO Thin Films Prepared from Different Source Materials |
| title_full_unstemmed | Solution Processed AZO Thin Films Prepared from Different Source Materials |
| title_short | Solution Processed AZO Thin Films Prepared from Different Source Materials |
| title_sort | solution processed azo thin films prepared from different source materials |
| topic | AZO Solution synthesis Spin coating Rapid thermal annealing Transparent conducting oxide |
| url | http://jnep.sumdu.edu.ua:8080/download/numbers/2017/3/articles/jnep_V9_03010.pdf |
| work_keys_str_mv | AT sanaullah solutionprocessedazothinfilmspreparedfromdifferentsourcematerials AT fabiodematteis solutionprocessedazothinfilmspreparedfromdifferentsourcematerials AT massimilianolucci solutionprocessedazothinfilmspreparedfromdifferentsourcematerials AT ivandavoli solutionprocessedazothinfilmspreparedfromdifferentsourcematerials |