On the issue of achieving subpicometric resolution by acousto-optic two-channel laser displacement interferometer with two different frequency photodetectors
The article discusses an acousto-optical (AO) heterodyne laser displacement interferometer (LDI) with two different-frequency photodetectors: highfrequency (HF) and low-frequency (LF) low-noise, working with «fast inaccurate» and «slow accurate» measuring channels, respectively. The mode of ope...
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Main Author: | |
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Format: | Article |
Language: | English |
Published: |
Omsk State Technical University, Federal State Autonoumos Educational Institution of Higher Education
2022-04-01
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Series: | Омский научный вестник |
Subjects: | |
Online Access: | https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2022/%E2%84%96%202%20(182)%20(%D0%9E%D0%9D%D0%92)/110-118%20%D0%9B%D0%B5%D1%83%D0%BD%20%D0%95.%20%D0%92..pdf |
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Summary: | The article discusses an acousto-optical (AO)
heterodyne laser displacement interferometer (LDI)
with two different-frequency photodetectors: highfrequency (HF) and low-frequency (LF) low-noise,
working with «fast inaccurate» and «slow accurate»
measuring channels, respectively.
The mode of operation of AO LDI at start-stop cyclic
motions of objects is described, which provides high
resolution at the initial and final stages of motions
with low speeds of motion. A metrological analysis
of the «slow accurate» channel is carried out taking
into account the noise frequency characteristics of
photodetectors with the formation of its so-called
«optimistic» and «pessimistic» variants. Based on the
metrological analysis carried out, the frequency ranges
of the signal are determined, which allow achieving
the resolution of AO LDI subpicometric values at low
speeds. |
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ISSN: | 1813-8225 2541-7541 |