Refractive index and thickness analysis of planar interfaces by prism coupling technique

Refractive index and thickness analysis of planar interfaces by prism coupling technique

Since 2022, various foundries are offering the manufacture of integrated photonic structures for the visible spectrum. As this technology continues to enter the market, there will be an increasing demand for accurate optical and dimensional characterization of these structures. To meet this demand,...

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Bibliographic Details
Main Authors: Lourenço Paulo, Vygranenko Yuri, Fernandes Miguel, Fantoni Alessandro, Vieira Manuela
Format: Article
Language:English
Published: EDP Sciences 2024-01-01
Series:EPJ Web of Conferences
Online Access:https://www.epj-conferences.org/articles/epjconf/pdf/2024/15/epjconf_aop2024_00023.pdf
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