Numerical Simulation of the High-Frequency Capacitive Discharge
The nonlinear problem of determining the interaction parameters between the high-frequency capacitive discharge and the sample placed on a substrate in the local approximation is considered. The problem is described by a system of nonlinear initial-value problems. A numerical method for solving this...
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| Main Author: | |
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| Format: | Article |
| Language: | English |
| Published: |
Kazan Federal University
2015-06-01
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| Series: | Учёные записки Казанского университета: Серия Физико-математические науки |
| Subjects: | |
| Online Access: | https://kpfu.ru/portal/docs/F_759694330/157_2_phys_mat_11.pdf |
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| Summary: | The nonlinear problem of determining the interaction parameters between the high-frequency capacitive discharge and the sample placed on a substrate in the local approximation is considered. The problem is described by a system of nonlinear initial-value problems. A numerical method for solving this problem is suggested. The results of numerical experiments for the model problem are given. Comparative analysis of these results with the characteristics of the high-frequency capacitive discharge without the sample is carried out. |
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| ISSN: | 2541-7746 2500-2198 |