Nonlinear Displacement of the Electrothermal V-Shaped Actuator

This article proposes a formula for calculating the nonlinear displacement of the electrothermal V-shaped actuator aims to determine more accurately its displacement. The nonlinear displacement model is established based on the axial deformation of V-beams with two fixed ends. Hence, the theoretical...

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Bibliographic Details
Main Authors: Truong Duc Phuc, Phuc Hong Pham, Kien Trung Hoang, Bui Ngoc-Tam
Format: Article
Language:English
Published: Wiley 2024-01-01
Series:Shock and Vibration
Online Access:http://dx.doi.org/10.1155/2024/7121490
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Summary:This article proposes a formula for calculating the nonlinear displacement of the electrothermal V-shaped actuator aims to determine more accurately its displacement. The nonlinear displacement model is established based on the axial deformation of V-beams with two fixed ends. Hence, the theoretical displacements of a particular V-shaped actuator (i.e. dimension as beam length of 750 μm; beam width of 6 μm; beam thickness of 30 μm; inclined angle of 2°) are compared with the simulation and experimental results. The evaluation shows that our calculation error compared with the simulation and experiment is less than 5% and 12.4%, respectively. This confirmed the advantages of the proposed formula according to the nonlinear displacement model. This work provides a theoretical model for predicting more precisely the displacement of a V-shaped actuator. The advantage of this model is that it will significantly reduce the time in the design and trial manufacturing process.
ISSN:1875-9203