Fabrication of Micro-Holes with High Aspect Ratios in C<sub>f</sub>/SiC Composites Using Coaxial Waterjet-Assisted Nanosecond Laser Drilling
In the present study, the coaxial waterjet-assisted nanosecond laser drilling of micro-holes in C<sub>f</sub>/SiC composites, coupled with nanosecond laser drilling in air for fabricating micro-holes with high aspect ratios, were investigated. The surface morphology, reaction products, a...
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MDPI AG
2025-07-01
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| author | Chenhu Yuan Zenggan Bian Yue Cao Yinan Xiao Bin Wang Jianting Guo Liyuan Sheng |
| author_facet | Chenhu Yuan Zenggan Bian Yue Cao Yinan Xiao Bin Wang Jianting Guo Liyuan Sheng |
| author_sort | Chenhu Yuan |
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| description | In the present study, the coaxial waterjet-assisted nanosecond laser drilling of micro-holes in C<sub>f</sub>/SiC composites, coupled with nanosecond laser drilling in air for fabricating micro-holes with high aspect ratios, were investigated. The surface morphology, reaction products, and micro-hole shapes were thoroughly examined. The results reveal that, for the coaxial waterjet-assisted nanosecond laser drilling of micro-holes in the C<sub>f</sub>/SiC composite, the increasing of waterjet velocity enhances the material removal rate and micro-hole depth, but reduces the micro-hole diameter and taper angle. The coaxial waterjet isolates the laser-ablated region and cools down the corresponding region rapidly, leading to the formation of a mixture of SiC, SiO<sub>2</sub>, and Si on the surface. As the coaxial waterjet velocity increases, the morphology of residual surface products changes from a net-like structure to individual spheres. Coaxial waterjet-assisted nanosecond laser drilling, with a waterjet velocity of 9.61 m/s, achieves micro-holes with a good balance between efficiency and quality. For the fabrication of micro-holes with a high aspect ratio in C<sub>f</sub>/SiC composites, micro-holes fabricated by nanosecond laser drilling in air exhibit obvious taper features, which should be ascribed to the combined effects of spattering slag, plasma, and energy dissipation. The application of coaxial waterjet-assisted nanosecond laser drilling on micro-holes fabricated by laser drilling in air effectively expands the hole diameter. The fabricated micro-holes have very small taper angles, with clean wall surfaces and almost no reaction products. This approach, combining nanosecond laser drilling in air followed by coaxial waterjet-assisted nanosecond laser drilling, offers a promising technique for fabricating high-quality micro-holes with high aspect ratios in C<sub>f</sub>/SiC composites. |
| format | Article |
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| institution | DOAJ |
| issn | 2072-666X |
| language | English |
| publishDate | 2025-07-01 |
| publisher | MDPI AG |
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| series | Micromachines |
| spelling | doaj-art-79a9be4f38ce4822a3930cbed26503172025-08-20T02:47:07ZengMDPI AGMicromachines2072-666X2025-07-0116781110.3390/mi16070811Fabrication of Micro-Holes with High Aspect Ratios in C<sub>f</sub>/SiC Composites Using Coaxial Waterjet-Assisted Nanosecond Laser DrillingChenhu Yuan0Zenggan Bian1Yue Cao2Yinan Xiao3Bin Wang4Jianting Guo5Liyuan Sheng6Department of Mechanical and Automotive Engineering, South China University of Technology, Guangzhou 510641, ChinaPKU-HKUST Shenzhen-Hong Kong Institution, Shenzhen 518057, ChinaPKU-HKUST Shenzhen-Hong Kong Institution, Shenzhen 518057, ChinaPKU-HKUST Shenzhen-Hong Kong Institution, Shenzhen 518057, ChinaPKU-HKUST Shenzhen-Hong Kong Institution, Shenzhen 518057, ChinaPKU-HKUST Shenzhen-Hong Kong Institution, Shenzhen 518057, ChinaPKU-HKUST Shenzhen-Hong Kong Institution, Shenzhen 518057, ChinaIn the present study, the coaxial waterjet-assisted nanosecond laser drilling of micro-holes in C<sub>f</sub>/SiC composites, coupled with nanosecond laser drilling in air for fabricating micro-holes with high aspect ratios, were investigated. The surface morphology, reaction products, and micro-hole shapes were thoroughly examined. The results reveal that, for the coaxial waterjet-assisted nanosecond laser drilling of micro-holes in the C<sub>f</sub>/SiC composite, the increasing of waterjet velocity enhances the material removal rate and micro-hole depth, but reduces the micro-hole diameter and taper angle. The coaxial waterjet isolates the laser-ablated region and cools down the corresponding region rapidly, leading to the formation of a mixture of SiC, SiO<sub>2</sub>, and Si on the surface. As the coaxial waterjet velocity increases, the morphology of residual surface products changes from a net-like structure to individual spheres. Coaxial waterjet-assisted nanosecond laser drilling, with a waterjet velocity of 9.61 m/s, achieves micro-holes with a good balance between efficiency and quality. For the fabrication of micro-holes with a high aspect ratio in C<sub>f</sub>/SiC composites, micro-holes fabricated by nanosecond laser drilling in air exhibit obvious taper features, which should be ascribed to the combined effects of spattering slag, plasma, and energy dissipation. The application of coaxial waterjet-assisted nanosecond laser drilling on micro-holes fabricated by laser drilling in air effectively expands the hole diameter. The fabricated micro-holes have very small taper angles, with clean wall surfaces and almost no reaction products. This approach, combining nanosecond laser drilling in air followed by coaxial waterjet-assisted nanosecond laser drilling, offers a promising technique for fabricating high-quality micro-holes with high aspect ratios in C<sub>f</sub>/SiC composites.https://www.mdpi.com/2072-666X/16/7/811coaxial waterjet-assisted nanosecond laser drillingC<sub>f</sub>/SiC compositesablation mechanismwaterjet velocitymicro-holes with high aspect ratios |
| spellingShingle | Chenhu Yuan Zenggan Bian Yue Cao Yinan Xiao Bin Wang Jianting Guo Liyuan Sheng Fabrication of Micro-Holes with High Aspect Ratios in C<sub>f</sub>/SiC Composites Using Coaxial Waterjet-Assisted Nanosecond Laser Drilling Micromachines coaxial waterjet-assisted nanosecond laser drilling C<sub>f</sub>/SiC composites ablation mechanism waterjet velocity micro-holes with high aspect ratios |
| title | Fabrication of Micro-Holes with High Aspect Ratios in C<sub>f</sub>/SiC Composites Using Coaxial Waterjet-Assisted Nanosecond Laser Drilling |
| title_full | Fabrication of Micro-Holes with High Aspect Ratios in C<sub>f</sub>/SiC Composites Using Coaxial Waterjet-Assisted Nanosecond Laser Drilling |
| title_fullStr | Fabrication of Micro-Holes with High Aspect Ratios in C<sub>f</sub>/SiC Composites Using Coaxial Waterjet-Assisted Nanosecond Laser Drilling |
| title_full_unstemmed | Fabrication of Micro-Holes with High Aspect Ratios in C<sub>f</sub>/SiC Composites Using Coaxial Waterjet-Assisted Nanosecond Laser Drilling |
| title_short | Fabrication of Micro-Holes with High Aspect Ratios in C<sub>f</sub>/SiC Composites Using Coaxial Waterjet-Assisted Nanosecond Laser Drilling |
| title_sort | fabrication of micro holes with high aspect ratios in c sub f sub sic composites using coaxial waterjet assisted nanosecond laser drilling |
| topic | coaxial waterjet-assisted nanosecond laser drilling C<sub>f</sub>/SiC composites ablation mechanism waterjet velocity micro-holes with high aspect ratios |
| url | https://www.mdpi.com/2072-666X/16/7/811 |
| work_keys_str_mv | AT chenhuyuan fabricationofmicroholeswithhighaspectratiosincsubfsubsiccompositesusingcoaxialwaterjetassistednanosecondlaserdrilling AT zengganbian fabricationofmicroholeswithhighaspectratiosincsubfsubsiccompositesusingcoaxialwaterjetassistednanosecondlaserdrilling AT yuecao fabricationofmicroholeswithhighaspectratiosincsubfsubsiccompositesusingcoaxialwaterjetassistednanosecondlaserdrilling AT yinanxiao fabricationofmicroholeswithhighaspectratiosincsubfsubsiccompositesusingcoaxialwaterjetassistednanosecondlaserdrilling AT binwang fabricationofmicroholeswithhighaspectratiosincsubfsubsiccompositesusingcoaxialwaterjetassistednanosecondlaserdrilling AT jiantingguo fabricationofmicroholeswithhighaspectratiosincsubfsubsiccompositesusingcoaxialwaterjetassistednanosecondlaserdrilling AT liyuansheng fabricationofmicroholeswithhighaspectratiosincsubfsubsiccompositesusingcoaxialwaterjetassistednanosecondlaserdrilling |