Biocompatible and Hermetic Encapsulation of PMUTs: Effects of Parylene F-VT4 and ALD Stacks on Membrane Vibration and Acoustic Performance
The motivation of this work is to enable the use of piezoelectric micromachined ultrasonic transducer (PMUT)-based implants within the human body for biomedical applications, particularly for power and data transfer for implanted medical devices. To protect surrounding tissue and ensure PMUT functio...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-06-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/25/13/4074 |
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