A new approach to increasing the sensitivity of a gas sensor based on nanocrystalline silicon carbide films

It was shown the possibility of increasing the sensitivity of a gas sensor based on nanocrystalline SiC films by using a scheme of a two-component sensing element, one of which is an n-nc-SiC film with electronic conductivity, and the second is an p-nc-SiC film with hole conductivity. It is shown th...

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Main Authors: Alexander Semenov, Denis Lubov
Format: Article
Language:English
Published: Politehperiodika 2021-12-01
Series:Tekhnologiya i Konstruirovanie v Elektronnoi Apparature
Subjects:
Online Access:https://tkea.com.ua/index.php/journal/article/view/65
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author Alexander Semenov
Denis Lubov
author_facet Alexander Semenov
Denis Lubov
author_sort Alexander Semenov
collection DOAJ
description It was shown the possibility of increasing the sensitivity of a gas sensor based on nanocrystalline SiC films by using a scheme of a two-component sensing element, one of which is an n-nc-SiC film with electronic conductivity, and the second is an p-nc-SiC film with hole conductivity. It is shown that due to the opposite polarity of changes in resistance in the films under the simultaneous action of gases, the difference in relative resistance changes Δ in the n-nc-SiC and p-nc-SiC films will always be greater than in each film separately. The expediency of using a two-component sensing element of a gas sensor based on nc-SiC films with electron and hole conduction is shown.
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series Tekhnologiya i Konstruirovanie v Elektronnoi Apparature
spelling doaj-art-774f9dc7ebab4efbb1e62d3972a8f7f72025-08-20T03:08:20ZengPolitehperiodikaTekhnologiya i Konstruirovanie v Elektronnoi Apparature2225-58182309-99922021-12-015–6111510.15222/TKEA2021.5-6.1165A new approach to increasing the sensitivity of a gas sensor based on nanocrystalline silicon carbide filmsAlexander Semenov0Denis Lubov1National Technical University "Kharkiv Polytechnic Institute"National Technical University "Kharkiv Polytechnic Institute"It was shown the possibility of increasing the sensitivity of a gas sensor based on nanocrystalline SiC films by using a scheme of a two-component sensing element, one of which is an n-nc-SiC film with electronic conductivity, and the second is an p-nc-SiC film with hole conductivity. It is shown that due to the opposite polarity of changes in resistance in the films under the simultaneous action of gases, the difference in relative resistance changes Δ in the n-nc-SiC and p-nc-SiC films will always be greater than in each film separately. The expediency of using a two-component sensing element of a gas sensor based on nc-SiC films with electron and hole conduction is shown.https://tkea.com.ua/index.php/journal/article/view/65nanocrystalline sic filmsgas sensorgas sensitivityelectronic conductivityhole conductivity
spellingShingle Alexander Semenov
Denis Lubov
A new approach to increasing the sensitivity of a gas sensor based on nanocrystalline silicon carbide films
Tekhnologiya i Konstruirovanie v Elektronnoi Apparature
nanocrystalline sic films
gas sensor
gas sensitivity
electronic conductivity
hole conductivity
title A new approach to increasing the sensitivity of a gas sensor based on nanocrystalline silicon carbide films
title_full A new approach to increasing the sensitivity of a gas sensor based on nanocrystalline silicon carbide films
title_fullStr A new approach to increasing the sensitivity of a gas sensor based on nanocrystalline silicon carbide films
title_full_unstemmed A new approach to increasing the sensitivity of a gas sensor based on nanocrystalline silicon carbide films
title_short A new approach to increasing the sensitivity of a gas sensor based on nanocrystalline silicon carbide films
title_sort new approach to increasing the sensitivity of a gas sensor based on nanocrystalline silicon carbide films
topic nanocrystalline sic films
gas sensor
gas sensitivity
electronic conductivity
hole conductivity
url https://tkea.com.ua/index.php/journal/article/view/65
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