Uniformity Masks Design Method Based on the Shadow Matrix for Coating Materials with Different Condensation Characteristics
An intuitionistic method is proposed to design shadow masks to achieve thickness profile control for evaporation coating processes. The proposed method is based on the concept of the shadow matrix, which is a matrix that contains coefficients that build quantitive relations between shape parameters...
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| Format: | Article |
| Language: | English |
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Wiley
2013-01-01
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| Series: | The Scientific World Journal |
| Online Access: | http://dx.doi.org/10.1155/2013/160792 |
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| _version_ | 1850219847273676800 |
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| author | Lichao Zhang Xikun Cai |
| author_facet | Lichao Zhang Xikun Cai |
| author_sort | Lichao Zhang |
| collection | DOAJ |
| description | An intuitionistic method is proposed to design shadow masks to achieve thickness profile control for evaporation coating processes. The proposed method is based on the concept of the shadow matrix, which is a matrix that contains coefficients that build quantitive relations between shape parameters of masks and shadow quantities of substrate directly. By using the shadow matrix, shape parameters of shadow masks could be derived simply by solving a matrix equation. Verification experiments were performed on a special case where coating materials have different condensation characteristics. By using the designed mask pair with complementary shapes, thickness uniformities of better than 98% are demonstrated for MgF2 () and LaF3 () simultaneously on a 280 mm diameter spherical substrate with the radius curvature of 200 mm. |
| format | Article |
| id | doaj-art-763d6d83cb8a4fd58ed3172ae0e2b2c2 |
| institution | OA Journals |
| issn | 1537-744X |
| language | English |
| publishDate | 2013-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | The Scientific World Journal |
| spelling | doaj-art-763d6d83cb8a4fd58ed3172ae0e2b2c22025-08-20T02:07:16ZengWileyThe Scientific World Journal1537-744X2013-01-01201310.1155/2013/160792160792Uniformity Masks Design Method Based on the Shadow Matrix for Coating Materials with Different Condensation CharacteristicsLichao Zhang0Xikun Cai1State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, China Academy of Sciences, Changchun 130033, ChinaState Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, China Academy of Sciences, Changchun 130033, ChinaAn intuitionistic method is proposed to design shadow masks to achieve thickness profile control for evaporation coating processes. The proposed method is based on the concept of the shadow matrix, which is a matrix that contains coefficients that build quantitive relations between shape parameters of masks and shadow quantities of substrate directly. By using the shadow matrix, shape parameters of shadow masks could be derived simply by solving a matrix equation. Verification experiments were performed on a special case where coating materials have different condensation characteristics. By using the designed mask pair with complementary shapes, thickness uniformities of better than 98% are demonstrated for MgF2 () and LaF3 () simultaneously on a 280 mm diameter spherical substrate with the radius curvature of 200 mm.http://dx.doi.org/10.1155/2013/160792 |
| spellingShingle | Lichao Zhang Xikun Cai Uniformity Masks Design Method Based on the Shadow Matrix for Coating Materials with Different Condensation Characteristics The Scientific World Journal |
| title | Uniformity Masks Design Method Based on the Shadow Matrix for Coating Materials with Different Condensation Characteristics |
| title_full | Uniformity Masks Design Method Based on the Shadow Matrix for Coating Materials with Different Condensation Characteristics |
| title_fullStr | Uniformity Masks Design Method Based on the Shadow Matrix for Coating Materials with Different Condensation Characteristics |
| title_full_unstemmed | Uniformity Masks Design Method Based on the Shadow Matrix for Coating Materials with Different Condensation Characteristics |
| title_short | Uniformity Masks Design Method Based on the Shadow Matrix for Coating Materials with Different Condensation Characteristics |
| title_sort | uniformity masks design method based on the shadow matrix for coating materials with different condensation characteristics |
| url | http://dx.doi.org/10.1155/2013/160792 |
| work_keys_str_mv | AT lichaozhang uniformitymasksdesignmethodbasedontheshadowmatrixforcoatingmaterialswithdifferentcondensationcharacteristics AT xikuncai uniformitymasksdesignmethodbasedontheshadowmatrixforcoatingmaterialswithdifferentcondensationcharacteristics |