An Air-gapped Cavity Filter Based on MEMS Process for 5G Millimeter Wave Applications

An Air-gapped Cavity Filter Based on MEMS Process for 5G Millimeter Wave Applications

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Bibliographic Details
Main Authors:	Y. Ding, J. Ding, X. Fan, J. Wang, Y. Yang
Format:	Article
Language:	English
Published:	MIDEM Society - Society for Microelectronics, Electronic Components and Materials 2025-05-01
Series:	Informacije MIDEM
Online Access:	http://www.midem-drustvo.si/Journal%20papers/MIDEM_55(2025)3p3.pdf
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