An Air-gapped Cavity Filter Based on MEMS Process for 5G Millimeter Wave Applications

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Bibliographic Details
Main Authors: Y. Ding, J. Ding, X. Fan, J. Wang, Y. Yang
Format: Article
Language:English
Published: MIDEM Society - Society for Microelectronics, Electronic Components and Materials 2025-05-01
Series:Informacije MIDEM
Online Access:http://www.midem-drustvo.si/Journal%20papers/MIDEM_55(2025)3p3.pdf
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author Y. Ding
J. Ding
X. Fan
J. Wang
Y. Yang
author_facet Y. Ding
J. Ding
X. Fan
J. Wang
Y. Yang
author_sort Y. Ding
collection DOAJ
format Article
id doaj-art-7565e55df11b475c8ac8493173b4fc10
institution OA Journals
issn 0352-9045
2232-6979
language English
publishDate 2025-05-01
publisher MIDEM Society - Society for Microelectronics, Electronic Components and Materials
record_format Article
series Informacije MIDEM
spelling doaj-art-7565e55df11b475c8ac8493173b4fc102025-08-20T02:29:24ZengMIDEM Society - Society for Microelectronics, Electronic Components and MaterialsInformacije MIDEM0352-90452232-69792025-05-0155330https://doi.org/10.33180/InfMIDEM2025.303An Air-gapped Cavity Filter Based on MEMS Process for 5G Millimeter Wave ApplicationsY. DingJ. DingX. FanJ. WangY. Yanghttp://www.midem-drustvo.si/Journal%20papers/MIDEM_55(2025)3p3.pdf
spellingShingle Y. Ding
J. Ding
X. Fan
J. Wang
Y. Yang
An Air-gapped Cavity Filter Based on MEMS Process for 5G Millimeter Wave Applications
Informacije MIDEM
title An Air-gapped Cavity Filter Based on MEMS Process for 5G Millimeter Wave Applications
title_full An Air-gapped Cavity Filter Based on MEMS Process for 5G Millimeter Wave Applications
title_fullStr An Air-gapped Cavity Filter Based on MEMS Process for 5G Millimeter Wave Applications
title_full_unstemmed An Air-gapped Cavity Filter Based on MEMS Process for 5G Millimeter Wave Applications
title_short An Air-gapped Cavity Filter Based on MEMS Process for 5G Millimeter Wave Applications
title_sort air gapped cavity filter based on mems process for 5g millimeter wave applications
url http://www.midem-drustvo.si/Journal%20papers/MIDEM_55(2025)3p3.pdf
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