Optimization and Validation of Wafer Surface Defect Detection Algorithm Based on RT-DETR

Optimization and Validation of Wafer Surface Defect Detection Algorithm Based on RT-DETR

In response to the issue of poor detection performance on wafer surface defect spots and elongated scratches, an improved RT-DETR method for wafer surface defect detection is proposed. Firstly, a dynamic snake convolutional layer is introduced to detect elongated scratches where conventional convolu...

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Bibliographic Details
Main Authors: Ao Xu, Yanwei Li, Hongbo Xie, Rui Yang, Jianjie Li, Jiaying Wang
Format: Article
Language:English
Published: IEEE 2025-01-01
Series:IEEE Access
Subjects:
Defects detection
deep learning
object detection
Online Access:https://ieeexplore.ieee.org/document/10892113/
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