APA (7th ed.) Citation

Zheng, B., Zhou, C., Wang, Q., Chen, Y., & Xue, W. Deposition of Low Stress Silicon Nitride Thin Film and Its Application in Surface Micromachining Device Structures. Wiley.

Chicago Style (17th ed.) Citation

Zheng, Beirong, Chen Zhou, Quan Wang, Yifeng Chen, and Wei Xue. Deposition of Low Stress Silicon Nitride Thin Film and Its Application in Surface Micromachining Device Structures. Wiley.

MLA (9th ed.) Citation

Zheng, Beirong, et al. Deposition of Low Stress Silicon Nitride Thin Film and Its Application in Surface Micromachining Device Structures. Wiley.