Electric-Field-Driven Generative Nanoimprinting for Tilted Metasurface Nanostructures

Electric-Field-Driven Generative Nanoimprinting for Tilted Metasurface Nanostructures

Highlights The developed electric-field-driven generative-nanoimprinting technology enables direct fabrication of large-area tilted metasurface nanostructures with cost-efficiency and high-throughput advantages. Real-time tuning of process parameters facilitates customized fabrication of various til...

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Bibliographic Details
Main Authors: Yu Fan, Chunhui Wang, Hongmiao Tian, Xiaoming Chen, Ben Q. Li, Zhaomin Wang, Xiangming Li, Xiaoliang Chen, Jinyou Shao
Format: Article
Language:English
Published: SpringerOpen 2025-07-01
Series:Nano-Micro Letters
Subjects:
Generative nanoimprinting
Electric field assistance
Tilted metasurface structures
Large-area fabrication
Online Access:https://doi.org/10.1007/s40820-025-01857-3
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