ELECTROCHEMICAL TECHNOLOGY FOR MICRO- AND NANOELECTRONIC DEVICES
Results of electrochemical technology creating of micro- and nanoelectronics facilities mainly hybrid microcircuits and multichip packages are cited. Aluminium substrates, multiple-level system of interconnections and aluminium frames for VLSI-circuits technologies are viewed. Results of electro-che...
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| Format: | Article |
| Language: | Russian |
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Educational institution «Belarusian State University of Informatics and Radioelectronics»
2019-06-01
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| Series: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
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| Online Access: | https://doklady.bsuir.by/jour/article/view/281 |
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| _version_ | 1849772757958524928 |
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| author | V. A. Sokol S. A. Kostyichenko |
| author_facet | V. A. Sokol S. A. Kostyichenko |
| author_sort | V. A. Sokol |
| collection | DOAJ |
| description | Results of electrochemical technology creating of micro- and nanoelectronics facilities mainly hybrid microcircuits and multichip packages are cited. Aluminium substrates, multiple-level system of interconnections and aluminium frames for VLSI-circuits technologies are viewed. Results of electro-chemical technology creating of nanoelectronics facilities such as operated matrix field-emission cath-odes and transistors, based on single-electron transport quantum effect are presented. |
| format | Article |
| id | doaj-art-73e33fce553e406a9530e8a1ddd969ad |
| institution | DOAJ |
| issn | 1729-7648 |
| language | Russian |
| publishDate | 2019-06-01 |
| publisher | Educational institution «Belarusian State University of Informatics and Radioelectronics» |
| record_format | Article |
| series | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| spelling | doaj-art-73e33fce553e406a9530e8a1ddd969ad2025-08-20T03:02:15ZrusEducational institution «Belarusian State University of Informatics and Radioelectronics»Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki1729-76482019-06-01021422280ELECTROCHEMICAL TECHNOLOGY FOR MICRO- AND NANOELECTRONIC DEVICESV. A. Sokol0S. A. Kostyichenko1Белорусский государственный университет информатики и радиоэлектроникиБелорусский государственный университет информатики и радиоэлектроникиResults of electrochemical technology creating of micro- and nanoelectronics facilities mainly hybrid microcircuits and multichip packages are cited. Aluminium substrates, multiple-level system of interconnections and aluminium frames for VLSI-circuits technologies are viewed. Results of electro-chemical technology creating of nanoelectronics facilities such as operated matrix field-emission cath-odes and transistors, based on single-electron transport quantum effect are presented.https://doklady.bsuir.by/jour/article/view/281анодированиеалюминийпористый оксид алюминиянаноэлектронные устройства |
| spellingShingle | V. A. Sokol S. A. Kostyichenko ELECTROCHEMICAL TECHNOLOGY FOR MICRO- AND NANOELECTRONIC DEVICES Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki анодирование алюминий пористый оксид алюминия наноэлектронные устройства |
| title | ELECTROCHEMICAL TECHNOLOGY FOR MICRO- AND NANOELECTRONIC DEVICES |
| title_full | ELECTROCHEMICAL TECHNOLOGY FOR MICRO- AND NANOELECTRONIC DEVICES |
| title_fullStr | ELECTROCHEMICAL TECHNOLOGY FOR MICRO- AND NANOELECTRONIC DEVICES |
| title_full_unstemmed | ELECTROCHEMICAL TECHNOLOGY FOR MICRO- AND NANOELECTRONIC DEVICES |
| title_short | ELECTROCHEMICAL TECHNOLOGY FOR MICRO- AND NANOELECTRONIC DEVICES |
| title_sort | electrochemical technology for micro and nanoelectronic devices |
| topic | анодирование алюминий пористый оксид алюминия наноэлектронные устройства |
| url | https://doklady.bsuir.by/jour/article/view/281 |
| work_keys_str_mv | AT vasokol electrochemicaltechnologyformicroandnanoelectronicdevices AT sakostyichenko electrochemicaltechnologyformicroandnanoelectronicdevices |