High-Density Arrayed Spectrometer with Microlens Array Grating for Multi-Channel Parallel Spectral Analysis
To enable multi-channel parallel spectral analysis in array-based devices such as micro-light-emitting diodes (Micro-LEDs) and line-scan spectral confocal systems, the development of compact array spectrometers has become increasingly important. In this work, a novel spectrometer architecture based...
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MDPI AG
2025-08-01
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| author | Fangyuan Zhao Zhigang Feng Shuonan Shan |
| author_facet | Fangyuan Zhao Zhigang Feng Shuonan Shan |
| author_sort | Fangyuan Zhao |
| collection | DOAJ |
| description | To enable multi-channel parallel spectral analysis in array-based devices such as micro-light-emitting diodes (Micro-LEDs) and line-scan spectral confocal systems, the development of compact array spectrometers has become increasingly important. In this work, a novel spectrometer architecture based on a microlens array grating (MLAG) is proposed, which addresses the major limitations of conventional spectrometers, including limited parallel detection capability, bulky structures, and insufficient spatial resolution. By integrating dispersion and focusing within a monolithic device, the system enables simultaneous acquisition across more than 2000 parallel channels within a 10 mm × 10 mm unit consisting of an <i>f</i> = 4 mm microlens and a 600 lines/mm blazed grating. Optimized microlens and aperture alignment allows for flexible control of the divergence angle of the incident light, and the system theoretically achieves nanometer-scale spectral resolution across a 380–780 nm wavelength range, with inter-channel measurement deviation below 1.25%. Experimental results demonstrate that this spectrometer system can theoretically support up to 2070 independently addressable subunits. At a wavelength of 638 nm, the coefficient of variation (CV) of spot spacing among array elements is as low as 1.11%, indicating high uniformity. The spectral repeatability precision is better than 1.0 nm, and after image enhancement, the standard deviation of the diffracted light shift is reduced to just 0.26 nm. The practical spectral resolution achieved is as fine as 3.0 nm. This platform supports wafer-level spectral screening of high-density Micro-LEDs, offering a practical hardware solution for high-precision industrial inline sorting, such as Micro-LED defect inspection. |
| format | Article |
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| institution | Kabale University |
| issn | 1424-8220 |
| language | English |
| publishDate | 2025-08-01 |
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| spelling | doaj-art-7350d3eea6df4c899789e6c22f829cdd2025-08-20T03:36:26ZengMDPI AGSensors1424-82202025-08-012515483310.3390/s25154833High-Density Arrayed Spectrometer with Microlens Array Grating for Multi-Channel Parallel Spectral AnalysisFangyuan Zhao0Zhigang Feng1Shuonan Shan2Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, ChinaTsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, ChinaTsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, ChinaTo enable multi-channel parallel spectral analysis in array-based devices such as micro-light-emitting diodes (Micro-LEDs) and line-scan spectral confocal systems, the development of compact array spectrometers has become increasingly important. In this work, a novel spectrometer architecture based on a microlens array grating (MLAG) is proposed, which addresses the major limitations of conventional spectrometers, including limited parallel detection capability, bulky structures, and insufficient spatial resolution. By integrating dispersion and focusing within a monolithic device, the system enables simultaneous acquisition across more than 2000 parallel channels within a 10 mm × 10 mm unit consisting of an <i>f</i> = 4 mm microlens and a 600 lines/mm blazed grating. Optimized microlens and aperture alignment allows for flexible control of the divergence angle of the incident light, and the system theoretically achieves nanometer-scale spectral resolution across a 380–780 nm wavelength range, with inter-channel measurement deviation below 1.25%. Experimental results demonstrate that this spectrometer system can theoretically support up to 2070 independently addressable subunits. At a wavelength of 638 nm, the coefficient of variation (CV) of spot spacing among array elements is as low as 1.11%, indicating high uniformity. The spectral repeatability precision is better than 1.0 nm, and after image enhancement, the standard deviation of the diffracted light shift is reduced to just 0.26 nm. The practical spectral resolution achieved is as fine as 3.0 nm. This platform supports wafer-level spectral screening of high-density Micro-LEDs, offering a practical hardware solution for high-precision industrial inline sorting, such as Micro-LED defect inspection.https://www.mdpi.com/1424-8220/25/15/4833spectrometerspectral detectionmulti-channel spectrometerMLAGMicro-LEDline-scan spectral confocal |
| spellingShingle | Fangyuan Zhao Zhigang Feng Shuonan Shan High-Density Arrayed Spectrometer with Microlens Array Grating for Multi-Channel Parallel Spectral Analysis Sensors spectrometer spectral detection multi-channel spectrometer MLAG Micro-LED line-scan spectral confocal |
| title | High-Density Arrayed Spectrometer with Microlens Array Grating for Multi-Channel Parallel Spectral Analysis |
| title_full | High-Density Arrayed Spectrometer with Microlens Array Grating for Multi-Channel Parallel Spectral Analysis |
| title_fullStr | High-Density Arrayed Spectrometer with Microlens Array Grating for Multi-Channel Parallel Spectral Analysis |
| title_full_unstemmed | High-Density Arrayed Spectrometer with Microlens Array Grating for Multi-Channel Parallel Spectral Analysis |
| title_short | High-Density Arrayed Spectrometer with Microlens Array Grating for Multi-Channel Parallel Spectral Analysis |
| title_sort | high density arrayed spectrometer with microlens array grating for multi channel parallel spectral analysis |
| topic | spectrometer spectral detection multi-channel spectrometer MLAG Micro-LED line-scan spectral confocal |
| url | https://www.mdpi.com/1424-8220/25/15/4833 |
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