Formation of targets and investigation of Mn4Si7 coatings produced by magnetron sputtering
The morphology, composition, electrical and optical properties of bulk samples and vacuum coatings of Mn4Si7 obtained by magnetron sputtering on a SiO2/Si structure were studied. It is shown that manganese silicide coatings with a thickness of about 150 nm are close in properties to bulk Mn4Si7, ha...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Academician Ye.A. Buketov Karaganda University
2023-09-01
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| Series: | Қарағанды университетінің хабаршысы. Физика сериясы |
| Subjects: | |
| Online Access: | https://phs.buketov.edu.kz/index.php/physics-vestnik/article/view/518 |
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