High-Tolerance Grating Couplers for Vertical Backside Coupling
To facilitate convenient packaging of photonic integrated circuits on a fiber tip, a silicon grating coupler designed for vertical backside coupling has been developed. In order to comply with foundry capabilities and streamline the fabrication processes, the grating coupler features a minimum featu...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-11-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/14/23/11015 |
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