High-Tolerance Grating Couplers for Vertical Backside Coupling
To facilitate convenient packaging of photonic integrated circuits on a fiber tip, a silicon grating coupler designed for vertical backside coupling has been developed. In order to comply with foundry capabilities and streamline the fabrication processes, the grating coupler features a minimum featu...
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| Format: | Article |
| Language: | English |
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MDPI AG
2024-11-01
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| Series: | Applied Sciences |
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| Online Access: | https://www.mdpi.com/2076-3417/14/23/11015 |
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| author | Jui-Hung Chen Arthur D. Bouamra Chia-Ling Wu Andrea Fiore Shuo-Yen Tseng |
| author_facet | Jui-Hung Chen Arthur D. Bouamra Chia-Ling Wu Andrea Fiore Shuo-Yen Tseng |
| author_sort | Jui-Hung Chen |
| collection | DOAJ |
| description | To facilitate convenient packaging of photonic integrated circuits on a fiber tip, a silicon grating coupler designed for vertical backside coupling has been developed. In order to comply with foundry capabilities and streamline the fabrication processes, the grating coupler features a minimum feature size larger than 200 nm and a single-etched structure on silicon. By inverse design-based optimization, the vertical backside grating coupler achieves a coupling efficiency of nearly 40% (−3.97 dB), while showcasing high fabrication and misalignment tolerance. |
| format | Article |
| id | doaj-art-71a342a0dc414a74aa009074f4a021e7 |
| institution | DOAJ |
| issn | 2076-3417 |
| language | English |
| publishDate | 2024-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Applied Sciences |
| spelling | doaj-art-71a342a0dc414a74aa009074f4a021e72025-08-20T02:50:17ZengMDPI AGApplied Sciences2076-34172024-11-0114231101510.3390/app142311015High-Tolerance Grating Couplers for Vertical Backside CouplingJui-Hung Chen0Arthur D. Bouamra1Chia-Ling Wu2Andrea Fiore3Shuo-Yen Tseng4Department of Photonics, National Cheng Kung University, No. 1 University Rd., Tainan City 701, TaiwanDepartment of Applied Physics and Science Education, Eindhoven University of Technology, 5600 MB Eindhoven, The NetherlandsDepartment of Photonics, National Cheng Kung University, No. 1 University Rd., Tainan City 701, TaiwanDepartment of Applied Physics and Science Education, Eindhoven University of Technology, 5600 MB Eindhoven, The NetherlandsDepartment of Photonics, National Cheng Kung University, No. 1 University Rd., Tainan City 701, TaiwanTo facilitate convenient packaging of photonic integrated circuits on a fiber tip, a silicon grating coupler designed for vertical backside coupling has been developed. In order to comply with foundry capabilities and streamline the fabrication processes, the grating coupler features a minimum feature size larger than 200 nm and a single-etched structure on silicon. By inverse design-based optimization, the vertical backside grating coupler achieves a coupling efficiency of nearly 40% (−3.97 dB), while showcasing high fabrication and misalignment tolerance.https://www.mdpi.com/2076-3417/14/23/11015grating coupleroptical fiber sensorsphotonic integrated circuits |
| spellingShingle | Jui-Hung Chen Arthur D. Bouamra Chia-Ling Wu Andrea Fiore Shuo-Yen Tseng High-Tolerance Grating Couplers for Vertical Backside Coupling Applied Sciences grating coupler optical fiber sensors photonic integrated circuits |
| title | High-Tolerance Grating Couplers for Vertical Backside Coupling |
| title_full | High-Tolerance Grating Couplers for Vertical Backside Coupling |
| title_fullStr | High-Tolerance Grating Couplers for Vertical Backside Coupling |
| title_full_unstemmed | High-Tolerance Grating Couplers for Vertical Backside Coupling |
| title_short | High-Tolerance Grating Couplers for Vertical Backside Coupling |
| title_sort | high tolerance grating couplers for vertical backside coupling |
| topic | grating coupler optical fiber sensors photonic integrated circuits |
| url | https://www.mdpi.com/2076-3417/14/23/11015 |
| work_keys_str_mv | AT juihungchen hightolerancegratingcouplersforverticalbacksidecoupling AT arthurdbouamra hightolerancegratingcouplersforverticalbacksidecoupling AT chialingwu hightolerancegratingcouplersforverticalbacksidecoupling AT andreafiore hightolerancegratingcouplersforverticalbacksidecoupling AT shuoyentseng hightolerancegratingcouplersforverticalbacksidecoupling |