Deposition and Characterization of Molybdenum Thin Film Using Direct Current Magnetron and Atomic Force Microscopy

Deposition and Characterization of Molybdenum Thin Film Using Direct Current Magnetron and Atomic Force Microscopy

In this paper, pure molybdenum (Mo) thin film has been deposited on blank Si substrate by DC magnetron sputtering technique. The deposition condition for all samples has not been changed except for the deposition time in order to study the influence of time on the thickness and surface morphology of...

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Bibliographic Details
Main Authors:	Muhtade Mustafa Aqil, Mohd Asyadi Azam, Mohd Faizal Aziz, Rhonira Latif
Format:	Article
Language:	English
Published:	Wiley 2017-01-01
Series:	Journal of Nanotechnology
Online Access:	http://dx.doi.org/10.1155/2017/4862087
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