Spectral Dependence of Optical Absorption of 4H-SiC Doped with Boron and Aluminum
Optical absorption of p-n-4H-SiC structures doped with boron and aluminum by low-temperature diffusion was studied for the first time. Diffusion of impurities was performed from aluminum-silicate and boron-silicate films (sources) fabricated by various methods. In the spectral dependences of optical...
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| Format: | Article |
| Language: | English |
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Wiley
2018-01-01
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| Series: | Journal of Spectroscopy |
| Online Access: | http://dx.doi.org/10.1155/2018/8705658 |
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| author | I. G. Atabaev Kh. N. Juraev M. U. Hajiev |
| author_facet | I. G. Atabaev Kh. N. Juraev M. U. Hajiev |
| author_sort | I. G. Atabaev |
| collection | DOAJ |
| description | Optical absorption of p-n-4H-SiC structures doped with boron and aluminum by low-temperature diffusion was studied for the first time. Diffusion of impurities was performed from aluminum-silicate and boron-silicate films (sources) fabricated by various methods. In the spectral dependences of optical absorption at room temperature, bands associated with transitions from impurity levels, as well as absorption bands associated with defects of the vacancy nature, were observed. The level of absorption in the samples was used to estimate concentration of defects. It was shown that the use of sources of impurity atoms created by using boron and aluminum chlorides allows one to reduce the concentration of vacancy defects. |
| format | Article |
| id | doaj-art-70ca34f8b79b43578280a8ae1f5ff33e |
| institution | Kabale University |
| issn | 2314-4920 2314-4939 |
| language | English |
| publishDate | 2018-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | Journal of Spectroscopy |
| spelling | doaj-art-70ca34f8b79b43578280a8ae1f5ff33e2025-02-03T01:09:00ZengWileyJournal of Spectroscopy2314-49202314-49392018-01-01201810.1155/2018/87056588705658Spectral Dependence of Optical Absorption of 4H-SiC Doped with Boron and AluminumI. G. Atabaev0Kh. N. Juraev1M. U. Hajiev2Physical-Technical Institute, Scientific Association “Physics-Sun”, Uzbek Academy of Sciences, Bodomzor Street 2B, Tashkent 100084, UzbekistanPhysical-Technical Institute, Scientific Association “Physics-Sun”, Uzbek Academy of Sciences, Bodomzor Street 2B, Tashkent 100084, UzbekistanPhysical-Technical Institute, Scientific Association “Physics-Sun”, Uzbek Academy of Sciences, Bodomzor Street 2B, Tashkent 100084, UzbekistanOptical absorption of p-n-4H-SiC structures doped with boron and aluminum by low-temperature diffusion was studied for the first time. Diffusion of impurities was performed from aluminum-silicate and boron-silicate films (sources) fabricated by various methods. In the spectral dependences of optical absorption at room temperature, bands associated with transitions from impurity levels, as well as absorption bands associated with defects of the vacancy nature, were observed. The level of absorption in the samples was used to estimate concentration of defects. It was shown that the use of sources of impurity atoms created by using boron and aluminum chlorides allows one to reduce the concentration of vacancy defects.http://dx.doi.org/10.1155/2018/8705658 |
| spellingShingle | I. G. Atabaev Kh. N. Juraev M. U. Hajiev Spectral Dependence of Optical Absorption of 4H-SiC Doped with Boron and Aluminum Journal of Spectroscopy |
| title | Spectral Dependence of Optical Absorption of 4H-SiC Doped with Boron and Aluminum |
| title_full | Spectral Dependence of Optical Absorption of 4H-SiC Doped with Boron and Aluminum |
| title_fullStr | Spectral Dependence of Optical Absorption of 4H-SiC Doped with Boron and Aluminum |
| title_full_unstemmed | Spectral Dependence of Optical Absorption of 4H-SiC Doped with Boron and Aluminum |
| title_short | Spectral Dependence of Optical Absorption of 4H-SiC Doped with Boron and Aluminum |
| title_sort | spectral dependence of optical absorption of 4h sic doped with boron and aluminum |
| url | http://dx.doi.org/10.1155/2018/8705658 |
| work_keys_str_mv | AT igatabaev spectraldependenceofopticalabsorptionof4hsicdopedwithboronandaluminum AT khnjuraev spectraldependenceofopticalabsorptionof4hsicdopedwithboronandaluminum AT muhajiev spectraldependenceofopticalabsorptionof4hsicdopedwithboronandaluminum |