Photolithographic Microfabrication of Microbatteries for On-Chip Energy Storage
Highlights The fundamental principles and step-by-step procedures of photolithography are introduced, and a nuanced understanding of its operational mechanisms and the criteria for photoresist selection is offered. Various specific roles that photolithography plays in microbatteries (MBs) fabricatio...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
SpringerOpen
2025-01-01
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| Series: | Nano-Micro Letters |
| Subjects: | |
| Online Access: | https://doi.org/10.1007/s40820-024-01625-9 |
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