The Potential of Reactively RF Sputtered ZnO Thin Films for the Fabrication of Microwave Filters
The piezoelectric properties of reactively sputtered ZnO thin films deposited on glass and silicon substrates were studied in order to assess their potential for the construction of RF overmoded filters. Films of high crystallographic orientation {002}, as shown by XRD measurements and SEM observati...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2000-01-01
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| Series: | Active and Passive Electronic Components |
| Online Access: | http://dx.doi.org/10.1155/APEC.23.75 |
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| Summary: | The piezoelectric properties of reactively sputtered ZnO thin films deposited on glass and
silicon substrates were studied in order to assess their potential for the construction of
RF overmoded filters. Films of high crystallographic orientation {002}, as shown by
XRD measurements and SEM observations, and high value of keff2
, calculated with the aid of the BVD model, were obtained after the optimization of the deposition conditions, with highly repetitive properties. Simple devices were designed and constructed on
silicon substrates which showed a quality factor of 1000 without the use of a Bragg
acoustic reflector, and a temperature drift of –30ppm/℃. |
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| ISSN: | 0882-7516 1563-5031 |