KAJIAN VARIASI SUHU ANNEALING DAN HOLDING TIME PADA PENUMBUHAN LAPISAN TIPIS BaZr0,15Ti0,85O3 DENGAN METODE SOL GEL
<p>Penumbuhan lapisan tipis BaZr<sub>0,15</sub>Ti<sub>0,85</sub>O<sub>3</sub><strong> </strong>telah dilakukan menggunakan metode <em>sol gel</em> di atas substrat Pt/Si yang disiapkan dengan <em>spin coater</em>. Penumbuh...
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| Main Authors: | S Hadiati, AH Ramelan, VI Variani, M Hikam, B Soegijono, DF Saputri, Y Iriani |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Universitas Negeri Semarang
2014-06-01
|
| Series: | Jurnal MIPA |
| Subjects: | |
| Online Access: | https://journal.unnes.ac.id/nju/index.php/JM/article/view/2957 |
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