Accuracy and reproducibility of ambient topographies at the nanoscale by AFM: Several months of metrological monitoring
With the high integration of microelectronic devices, nanoscale surface characterization is critical to process development. The widely used atomic force microscopy provides 2D characterization of the surface at the nanoscale. In this paper, a statistical study of the topographic mode PeakForce Tapp...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2025-01-01
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| Series: | EPJ Web of Conferences |
| Online Access: | https://www.epj-conferences.org/articles/epjconf/pdf/2025/08/epjconf_cim2025_13001.pdf |
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