Impact of Strain on Sub-3 nm Gate-All-Around CMOS Logic Circuit Performance Using a Neural Compact Modeling Approach

Impact of strain of sub-3 nm gate-all-around (GAA) CMOS transistors on the circuit performance is evaluated using a neural compact model. The model was trained using 3D technology computer-aided design (TCAD) device simulation data of GAA field-effect transistors (FETs) subjected to both tensile and...

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Main Authors: Ji Hwan Lee, Kihwan Kim, Kyungjin Rim, Soogine Chong, Hyunbo Cho, Saeroonter Oh
Format: Article
Language:English
Published: IEEE 2024-01-01
Series:IEEE Journal of the Electron Devices Society
Subjects:
Online Access:https://ieeexplore.ieee.org/document/10680295/
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author Ji Hwan Lee
Kihwan Kim
Kyungjin Rim
Soogine Chong
Hyunbo Cho
Saeroonter Oh
author_facet Ji Hwan Lee
Kihwan Kim
Kyungjin Rim
Soogine Chong
Hyunbo Cho
Saeroonter Oh
author_sort Ji Hwan Lee
collection DOAJ
description Impact of strain of sub-3 nm gate-all-around (GAA) CMOS transistors on the circuit performance is evaluated using a neural compact model. The model was trained using 3D technology computer-aided design (TCAD) device simulation data of GAA field-effect transistors (FETs) subjected to both tensile and compressive strain in nMOS and pMOS devices. Strain was induced into the channel via lattice mismatch between the channel and source/drain epitaxial regions, as simulated by 3D TCAD process simulator. The transport models were calibrated against advanced Monte Carlo simulations to ensure accuracy. The resulting neural compact model demonstrated a close approximation to the original simulation results, achieving a minimal error of 1%. To assess the strain effect on circuit-level performance, SPICE simulations were conducted for a 5-stage ring oscillator and a 2-input NAND gate using the neural compact model. The propagation delay of the 5-stage ring oscillator improved from 3.60 ps to 2.85 ps when implementing strained GAA FETs. Also, strain enhanced the power-delay product of the 2-input NAND gate by 13.8% to 15.5%, depending on the input voltage sequence.
format Article
id doaj-art-6c071d2c300e4f238f314d4c7ad003f4
institution Kabale University
issn 2168-6734
language English
publishDate 2024-01-01
publisher IEEE
record_format Article
series IEEE Journal of the Electron Devices Society
spelling doaj-art-6c071d2c300e4f238f314d4c7ad003f42025-01-28T00:00:44ZengIEEEIEEE Journal of the Electron Devices Society2168-67342024-01-011277077410.1109/JEDS.2024.345987210680295Impact of Strain on Sub-3 nm Gate-All-Around CMOS Logic Circuit Performance Using a Neural Compact Modeling ApproachJi Hwan Lee0Kihwan Kim1Kyungjin Rim2Soogine Chong3Hyunbo Cho4https://orcid.org/0009-0006-0425-5301Saeroonter Oh5https://orcid.org/0000-0003-4281-6879Department of Electronic and Electrical Engineering, Hanyang University, Ansan, Republic of KoreaDepartment of Electronic and Electrical Engineering, Hanyang University, Ansan, Republic of KoreaResearch and Development Center, Alsemy Inc., Seoul, Republic of KoreaResearch and Development Center, Alsemy Inc., Seoul, Republic of KoreaResearch and Development Center, Alsemy Inc., Seoul, Republic of KoreaDepartment of Electronic and Electrical Engineering, Hanyang University, Ansan, Republic of KoreaImpact of strain of sub-3 nm gate-all-around (GAA) CMOS transistors on the circuit performance is evaluated using a neural compact model. The model was trained using 3D technology computer-aided design (TCAD) device simulation data of GAA field-effect transistors (FETs) subjected to both tensile and compressive strain in nMOS and pMOS devices. Strain was induced into the channel via lattice mismatch between the channel and source/drain epitaxial regions, as simulated by 3D TCAD process simulator. The transport models were calibrated against advanced Monte Carlo simulations to ensure accuracy. The resulting neural compact model demonstrated a close approximation to the original simulation results, achieving a minimal error of 1%. To assess the strain effect on circuit-level performance, SPICE simulations were conducted for a 5-stage ring oscillator and a 2-input NAND gate using the neural compact model. The propagation delay of the 5-stage ring oscillator improved from 3.60 ps to 2.85 ps when implementing strained GAA FETs. Also, strain enhanced the power-delay product of the 2-input NAND gate by 13.8% to 15.5%, depending on the input voltage sequence.https://ieeexplore.ieee.org/document/10680295/Strain engineeringgate-all-around CMOSneural compact modelcircuit performance
spellingShingle Ji Hwan Lee
Kihwan Kim
Kyungjin Rim
Soogine Chong
Hyunbo Cho
Saeroonter Oh
Impact of Strain on Sub-3 nm Gate-All-Around CMOS Logic Circuit Performance Using a Neural Compact Modeling Approach
IEEE Journal of the Electron Devices Society
Strain engineering
gate-all-around CMOS
neural compact model
circuit performance
title Impact of Strain on Sub-3 nm Gate-All-Around CMOS Logic Circuit Performance Using a Neural Compact Modeling Approach
title_full Impact of Strain on Sub-3 nm Gate-All-Around CMOS Logic Circuit Performance Using a Neural Compact Modeling Approach
title_fullStr Impact of Strain on Sub-3 nm Gate-All-Around CMOS Logic Circuit Performance Using a Neural Compact Modeling Approach
title_full_unstemmed Impact of Strain on Sub-3 nm Gate-All-Around CMOS Logic Circuit Performance Using a Neural Compact Modeling Approach
title_short Impact of Strain on Sub-3 nm Gate-All-Around CMOS Logic Circuit Performance Using a Neural Compact Modeling Approach
title_sort impact of strain on sub 3 nm gate all around cmos logic circuit performance using a neural compact modeling approach
topic Strain engineering
gate-all-around CMOS
neural compact model
circuit performance
url https://ieeexplore.ieee.org/document/10680295/
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AT kyungjinrim impactofstrainonsub3nmgateallaroundcmoslogiccircuitperformanceusinganeuralcompactmodelingapproach
AT sooginechong impactofstrainonsub3nmgateallaroundcmoslogiccircuitperformanceusinganeuralcompactmodelingapproach
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