Harmonic balance method for MEMS oscillators

IntroductionMicro-Electro-Mechanical System (MEMS) oscillators play a pivotal role in diverse applications such as biosensors and wearable sensors. To optimize their performance and ensure reliability, exploring their periodic properties and pull-in instability during the study of MEMS oscillators w...

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Bibliographic Details
Main Authors: Xian-He Lei, Yutong Cui
Format: Article
Language:English
Published: Frontiers Media S.A. 2025-06-01
Series:Frontiers in Physics
Subjects:
Online Access:https://www.frontiersin.org/articles/10.3389/fphy.2025.1597421/full
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