Harmonic balance method for MEMS oscillators
IntroductionMicro-Electro-Mechanical System (MEMS) oscillators play a pivotal role in diverse applications such as biosensors and wearable sensors. To optimize their performance and ensure reliability, exploring their periodic properties and pull-in instability during the study of MEMS oscillators w...
Saved in:
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Frontiers Media S.A.
2025-06-01
|
| Series: | Frontiers in Physics |
| Subjects: | |
| Online Access: | https://www.frontiersin.org/articles/10.3389/fphy.2025.1597421/full |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|