APA (7th ed.) Citation

Moon, S., Lee, D. G., Choi, J., Hong, J., Lee, T., Ekinci, Y., & Ahn, J. Impact of Sn Particle-Induced Mask Diffraction on EUV Lithography Performance Across Different Pattern Types. MDPI AG.

Chicago Style (17th ed.) Citation

Moon, Seungchan, Dong Gi Lee, Jinhyuk Choi, Junho Hong, Taeho Lee, Yasin Ekinci, and Jinho Ahn. Impact of Sn Particle-Induced Mask Diffraction on EUV Lithography Performance Across Different Pattern Types. MDPI AG.

MLA (9th ed.) Citation

Moon, Seungchan, et al. Impact of Sn Particle-Induced Mask Diffraction on EUV Lithography Performance Across Different Pattern Types. MDPI AG.