Open-ended microwave oven with E-field uniformity

In this paper, a new open-ended microwave oven with E-field uniformity has been proposed for microelectronics packaging curing. The open-ended oven contains three dielectrics and an air-filled section, being physically open at one end but electrically shielded due to the evanescent mode in the air-f...

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Main Authors: Jeong-Hun Park, Jee-Won Kim, Moon-Que Lee
Format: Article
Language:English
Published: Elsevier 2025-02-01
Series:Case Studies in Thermal Engineering
Subjects:
Online Access:http://www.sciencedirect.com/science/article/pii/S2214157X2500022X
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author Jeong-Hun Park
Jee-Won Kim
Moon-Que Lee
author_facet Jeong-Hun Park
Jee-Won Kim
Moon-Que Lee
author_sort Jeong-Hun Park
collection DOAJ
description In this paper, a new open-ended microwave oven with E-field uniformity has been proposed for microelectronics packaging curing. The open-ended oven contains three dielectrics and an air-filled section, being physically open at one end but electrically shielded due to the evanescent mode in the air-filled section. The first, second, and third dielectrics are square, square, and ring-shaped, respectively. The relative permittivities of them are 2.1, 6.6, and 20.6, respectively. The first dielectric is used for a TM11 mode cavity. The second and third dielectrics serve as λ/4 impedance transformers for the entire face and the edge face, respectively. The second and third dielectrics, shifting the field along a longitudinal direction, increase the E-field intensities in the center region and perimeter region, respectively, on the external surface of the dielectric-air interface. The combination of both second and third dielectrics can result in the E-field uniformity and maximization at the dielectric-open end. In simulated analysis, uniformities of 2.8 %, 2.8 %, and 2.7 % for the TM11(1st), TM11(2nd), and TM11(3rd) modes were obtained, which are 7.6, 7.9, and 9.3 times better, respectively, than those of the conventional open-ended oven. The E-field uniformity was verified through experimental tests in two cases.
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series Case Studies in Thermal Engineering
spelling doaj-art-6bb120243c424c4d8f6eeae679b3cb1f2025-02-02T05:27:23ZengElsevierCase Studies in Thermal Engineering2214-157X2025-02-0166105762Open-ended microwave oven with E-field uniformityJeong-Hun Park0Jee-Won Kim1Moon-Que Lee2School of Electrical and Computer Engineering, University of Seoul, 163, Seoulsiripdae-ro, Dongdaemun-gu, Seoul, 02504, South KoreaSchool of Electrical and Computer Engineering, University of Seoul, 163, Seoulsiripdae-ro, Dongdaemun-gu, Seoul, 02504, South KoreaCorresponding author.; School of Electrical and Computer Engineering, University of Seoul, 163, Seoulsiripdae-ro, Dongdaemun-gu, Seoul, 02504, South KoreaIn this paper, a new open-ended microwave oven with E-field uniformity has been proposed for microelectronics packaging curing. The open-ended oven contains three dielectrics and an air-filled section, being physically open at one end but electrically shielded due to the evanescent mode in the air-filled section. The first, second, and third dielectrics are square, square, and ring-shaped, respectively. The relative permittivities of them are 2.1, 6.6, and 20.6, respectively. The first dielectric is used for a TM11 mode cavity. The second and third dielectrics serve as λ/4 impedance transformers for the entire face and the edge face, respectively. The second and third dielectrics, shifting the field along a longitudinal direction, increase the E-field intensities in the center region and perimeter region, respectively, on the external surface of the dielectric-air interface. The combination of both second and third dielectrics can result in the E-field uniformity and maximization at the dielectric-open end. In simulated analysis, uniformities of 2.8 %, 2.8 %, and 2.7 % for the TM11(1st), TM11(2nd), and TM11(3rd) modes were obtained, which are 7.6, 7.9, and 9.3 times better, respectively, than those of the conventional open-ended oven. The E-field uniformity was verified through experimental tests in two cases.http://www.sciencedirect.com/science/article/pii/S2214157X2500022XMicrowave curingHeatingCavityWaveguideUniformity
spellingShingle Jeong-Hun Park
Jee-Won Kim
Moon-Que Lee
Open-ended microwave oven with E-field uniformity
Case Studies in Thermal Engineering
Microwave curing
Heating
Cavity
Waveguide
Uniformity
title Open-ended microwave oven with E-field uniformity
title_full Open-ended microwave oven with E-field uniformity
title_fullStr Open-ended microwave oven with E-field uniformity
title_full_unstemmed Open-ended microwave oven with E-field uniformity
title_short Open-ended microwave oven with E-field uniformity
title_sort open ended microwave oven with e field uniformity
topic Microwave curing
Heating
Cavity
Waveguide
Uniformity
url http://www.sciencedirect.com/science/article/pii/S2214157X2500022X
work_keys_str_mv AT jeonghunpark openendedmicrowaveovenwithefielduniformity
AT jeewonkim openendedmicrowaveovenwithefielduniformity
AT moonquelee openendedmicrowaveovenwithefielduniformity