Tailored measurement setup for the contactless characterization of MEMS resonators at the wafer level
<p>Statistical analysis of microelectromechanical system (MEMS) resonator devices in an early stage of device fabrication is challenging since actuation and sensing of the frequency-dependent response characteristics are often impossible before electrical connections are established. Photo-the...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Copernicus Publications
2025-05-01
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| Series: | Journal of Sensors and Sensor Systems |
| Online Access: | https://jsss.copernicus.org/articles/14/89/2025/jsss-14-89-2025.pdf |
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