APA (7th ed.) Citation

Huber, D., Schneider, M., Fulmek, P., Pfusterschmied, G., & Schmid, U. Tailored measurement setup for the contactless characterization of MEMS resonators at the wafer level. Copernicus Publications.

Chicago Style (17th ed.) Citation

Huber, D., M. Schneider, P. Fulmek, G. Pfusterschmied, and U. Schmid. Tailored Measurement Setup for the Contactless Characterization of MEMS Resonators at the Wafer Level. Copernicus Publications.

MLA (9th ed.) Citation

Huber, D., et al. Tailored Measurement Setup for the Contactless Characterization of MEMS Resonators at the Wafer Level. Copernicus Publications.