A new multistep Si{1 0 0} machining process for aspheric cavities: the role of high-index surfaces
Bulk silicon (Si) micromachining in the {1 0 0} family of planes, despite its apparent simplicity, remains an effective process for developing increasingly diverse microstructures and applications. Based on fourfold crystal symmetry and aqueous potassium hydroxide (KOH) solutions, this Si...
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| Format: | Article |
| Language: | English |
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Academia.edu Journals
2025-02-01
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| Series: | Academia Materials Science |
| Online Access: | https://www.academia.edu/127586509/A_new_multistep_Si_1_0_0_machining_process_for_aspheric_cavities_the_role_of_high_index_surfaces |
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