Sianko, S. F., Sianko, A. S., & Zelenin, V. A. Quantitative characterization of topographic defects of semiconductor silicon wafers. Educational institution «Belarusian State University of Informatics and Radioelectronics».
Chicago Style (17th ed.) CitationSianko, S. F., A. S. Sianko, and V. A. Zelenin. Quantitative Characterization of Topographic Defects of Semiconductor Silicon Wafers. Educational institution «Belarusian State University of Informatics and Radioelectronics».
MLA (9th ed.) CitationSianko, S. F., et al. Quantitative Characterization of Topographic Defects of Semiconductor Silicon Wafers. Educational institution «Belarusian State University of Informatics and Radioelectronics».
Warning: These citations may not always be 100% accurate.