Characterization of Evanescent Field Gas Sensor Structures Based on Silicon Photonics
Photonic sensors that operate in the mid-infrared spectral range are an emerging field for photonic microsystems. In this paper, we present a photonic gas sensor concept based on silicon waveguides using infrared evanescent field absorption. The waveguides were specifically designed for CO<inline...
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2018-01-01
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| Series: | IEEE Photonics Journal |
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| Online Access: | https://ieeexplore.ieee.org/document/8444677/ |
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| author | Christian Ranacher Cristina Consani Natalie Vollert Andreas Tortschanoff Markus Bergmeister Thomas Grille Bernhard Jakoby |
| author_facet | Christian Ranacher Cristina Consani Natalie Vollert Andreas Tortschanoff Markus Bergmeister Thomas Grille Bernhard Jakoby |
| author_sort | Christian Ranacher |
| collection | DOAJ |
| description | Photonic sensors that operate in the mid-infrared spectral range are an emerging field for photonic microsystems. In this paper, we present a photonic gas sensor concept based on silicon waveguides using infrared evanescent field absorption. The waveguides were specifically designed for CO<inline-formula><tex-math notation="LaTeX">$_{2}$ </tex-math></inline-formula> sensing at a wavelength of <inline-formula><tex-math notation="LaTeX">$\lambda ={\text{4.26}}\,\mathrm{\mu m}$</tex-math></inline-formula> as possible application for the proposed sensor platform. The waveguide cross section as well as the substructure were investigated using finite-element simulations and the devised structures were fabricated using mass fabrication processes exclusively. In order to evaluate the potential for long interaction path lengths using polysilicon strip waveguides, a study on the intrinsic losses of polysilicon waveguides was conducted. The lowest intrinsic damping that was obtained for polysilicon strip waveguides was 3.98 dB/cm. Furthermore, the sensing capability of the devised waveguides was tested with quantitative CO<inline-formula> <tex-math notation="LaTeX">$_{2}$</tex-math></inline-formula> measurements down to a concentration of 500 ppm CO <inline-formula><tex-math notation="LaTeX">$_{2}$</tex-math></inline-formula>. From the quantitative measurements, the evanescent field ratio was estimated and was in the range between <inline-formula><tex-math notation="LaTeX">$\eta ={\text{14}{\%}}\hbox{--}{\text{16}{\%}}$</tex-math></inline-formula>. |
| format | Article |
| id | doaj-art-6a865e1e1abd475e8c23e0422463d929 |
| institution | Kabale University |
| issn | 1943-0655 |
| language | English |
| publishDate | 2018-01-01 |
| publisher | IEEE |
| record_format | Article |
| series | IEEE Photonics Journal |
| spelling | doaj-art-6a865e1e1abd475e8c23e0422463d9292025-08-20T03:31:21ZengIEEEIEEE Photonics Journal1943-06552018-01-0110511410.1109/JPHOT.2018.28666288444677Characterization of Evanescent Field Gas Sensor Structures Based on Silicon PhotonicsChristian Ranacher0https://orcid.org/0000-0001-5646-7230Cristina Consani1Natalie Vollert2Andreas Tortschanoff3Markus Bergmeister4Thomas Grille5Bernhard Jakoby6https://orcid.org/0000-0002-2918-7150Carinthian Tech Research AG, Villach, AustriaCarinthian Tech Research AG, Villach, AustriaCarinthian Tech Research AG, Villach, AustriaCarinthian Tech Research AG, Villach, AustriaInfineon Technologies Austria AG, Villach, AustriaInfineon Technologies Austria AG, Villach, AustriaInstitute for Microelectronics and Microsensors, Johannes Kepler University Linz, Linz, AustriaPhotonic sensors that operate in the mid-infrared spectral range are an emerging field for photonic microsystems. In this paper, we present a photonic gas sensor concept based on silicon waveguides using infrared evanescent field absorption. The waveguides were specifically designed for CO<inline-formula><tex-math notation="LaTeX">$_{2}$ </tex-math></inline-formula> sensing at a wavelength of <inline-formula><tex-math notation="LaTeX">$\lambda ={\text{4.26}}\,\mathrm{\mu m}$</tex-math></inline-formula> as possible application for the proposed sensor platform. The waveguide cross section as well as the substructure were investigated using finite-element simulations and the devised structures were fabricated using mass fabrication processes exclusively. In order to evaluate the potential for long interaction path lengths using polysilicon strip waveguides, a study on the intrinsic losses of polysilicon waveguides was conducted. The lowest intrinsic damping that was obtained for polysilicon strip waveguides was 3.98 dB/cm. Furthermore, the sensing capability of the devised waveguides was tested with quantitative CO<inline-formula> <tex-math notation="LaTeX">$_{2}$</tex-math></inline-formula> measurements down to a concentration of 500 ppm CO <inline-formula><tex-math notation="LaTeX">$_{2}$</tex-math></inline-formula>. From the quantitative measurements, the evanescent field ratio was estimated and was in the range between <inline-formula><tex-math notation="LaTeX">$\eta ={\text{14}{\%}}\hbox{--}{\text{16}{\%}}$</tex-math></inline-formula>.https://ieeexplore.ieee.org/document/8444677/Optical gas sensingintegrated silicon photonicssilicon waveguideevanescent field absorptionintrinsic losses. |
| spellingShingle | Christian Ranacher Cristina Consani Natalie Vollert Andreas Tortschanoff Markus Bergmeister Thomas Grille Bernhard Jakoby Characterization of Evanescent Field Gas Sensor Structures Based on Silicon Photonics IEEE Photonics Journal Optical gas sensing integrated silicon photonics silicon waveguide evanescent field absorption intrinsic losses. |
| title | Characterization of Evanescent Field Gas Sensor Structures Based on Silicon Photonics |
| title_full | Characterization of Evanescent Field Gas Sensor Structures Based on Silicon Photonics |
| title_fullStr | Characterization of Evanescent Field Gas Sensor Structures Based on Silicon Photonics |
| title_full_unstemmed | Characterization of Evanescent Field Gas Sensor Structures Based on Silicon Photonics |
| title_short | Characterization of Evanescent Field Gas Sensor Structures Based on Silicon Photonics |
| title_sort | characterization of evanescent field gas sensor structures based on silicon photonics |
| topic | Optical gas sensing integrated silicon photonics silicon waveguide evanescent field absorption intrinsic losses. |
| url | https://ieeexplore.ieee.org/document/8444677/ |
| work_keys_str_mv | AT christianranacher characterizationofevanescentfieldgassensorstructuresbasedonsiliconphotonics AT cristinaconsani characterizationofevanescentfieldgassensorstructuresbasedonsiliconphotonics AT natalievollert characterizationofevanescentfieldgassensorstructuresbasedonsiliconphotonics AT andreastortschanoff characterizationofevanescentfieldgassensorstructuresbasedonsiliconphotonics AT markusbergmeister characterizationofevanescentfieldgassensorstructuresbasedonsiliconphotonics AT thomasgrille characterizationofevanescentfieldgassensorstructuresbasedonsiliconphotonics AT bernhardjakoby characterizationofevanescentfieldgassensorstructuresbasedonsiliconphotonics |