Polarity controlled ScAlN multi-layer transduction structures grown by molecular beam epitaxy

Polarity controlled ScAlN multi-layer transduction structures grown by molecular beam epitaxy

We report on the molecular beam epitaxial growth and characterization of polarity-controlled single and multi-layer Scandium Aluminum Nitride (ScAlN) transduction structures grown directly on ScAlN templates deposited by physical vapor deposition (PVD) on Si(001) substrates. It is observed that dire...

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Bibliographic Details
Main Authors: Shubham Mondal, Eitan Hershkovitz, Garrett Baucom, Md Mehedi Hasan Tanim, Shaurya Dabas, Baibhab Chatterjee, Honggyu Kim, Roozbeh Tabrizian, Zetian Mi
Format: Article
Language:English
Published: AIP Publishing LLC 2024-11-01
Series:APL Materials
Online Access:http://dx.doi.org/10.1063/5.0225280
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