Research on application of diamond FAT for black lithium tantalate wafer processing based on nanoindentation and scratch techniques

Research on application of diamond FAT for black lithium tantalate wafer processing based on nanoindentation and scratch techniques

Abstract Lithium tantalate (LiTaO3, LT) single crystal has been widely applied in the fields of electro-optical and piezoelectric devices. In this study, diamond fixed-abrasive tools (FAT) for LT were fabricated using consolidation abrasive processing technology to streamline the LT wafers processin...

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Bibliographic Details
Main Authors: Linlin Cao, Zhijie Huang, Zhanshuo Zhang, Wei Wei, Tingting Cai, Xiaolong Zhou, Chengyu Sun, Julong Yuan, Wei Hang, Huiying Ni, Yingjie Wang
Format: Article
Language:English
Published: Nature Portfolio 2025-02-01
Series:Scientific Reports
Subjects:
Diamond fixed-abrasive tool
Lithium tantalate
Material removal rate
Nanoindentation
Surface roughness
Online Access:https://doi.org/10.1038/s41598-025-89473-4
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