Characterization of GaN Nanorods Fabricated Using Ni Nanomasking and Reactive Ion Etching: A Top-Down Approach

Large thermal mismatch between GaN surface and sapphire results in compressive stress in Gallium Nitride (GaN) layer which degrades the device performance. Nanostructuring the GaN can reduce this stress leading to reduction in Quantum Confined Stark Effect. Aligned GaN nanorods based nanodevices hav...

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Main Authors: Ashutosh Kumar, Michael Latzel, C. Tessarek, S. Christiansen, R. Singh
Format: Article
Language:English
Published: Sumy State University 2013-05-01
Series:Журнал нано- та електронної фізики
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Online Access:http://jnep.sumdu.edu.ua/download/numbers/2013/2/articles/jnep_2013_V5_02001.pdf
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author Ashutosh Kumar
Michael Latzel
C. Tessarek
S. Christiansen
R. Singh
author_facet Ashutosh Kumar
Michael Latzel
C. Tessarek
S. Christiansen
R. Singh
author_sort Ashutosh Kumar
collection DOAJ
description Large thermal mismatch between GaN surface and sapphire results in compressive stress in Gallium Nitride (GaN) layer which degrades the device performance. Nanostructuring the GaN can reduce this stress leading to reduction in Quantum Confined Stark Effect. Aligned GaN nanorods based nanodevices have potential applications in electronics and optoelectronics. This paper describes the fabrication of GaN nanorods using Ni nanomasking and reactive ion etching. The morphology of GaN nanorods was studied by field emission scanning electron microscopy. The optical properties of GaN nanorods were studied by Cathodoluminescence (CL) spectroscopy. CL results revealed the existence of characteristic band-edge luminescence and yellow band luminescence.
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publisher Sumy State University
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series Журнал нано- та електронної фізики
spelling doaj-art-664ffbfc7fd24138be64872f4a7d30422025-08-20T01:57:19ZengSumy State UniversityЖурнал нано- та електронної фізики2077-67722013-05-0152020011Characterization of GaN Nanorods Fabricated Using Ni Nanomasking and Reactive Ion Etching: A Top-Down ApproachAshutosh KumarMichael LatzelC. TessarekS. ChristiansenR. SinghLarge thermal mismatch between GaN surface and sapphire results in compressive stress in Gallium Nitride (GaN) layer which degrades the device performance. Nanostructuring the GaN can reduce this stress leading to reduction in Quantum Confined Stark Effect. Aligned GaN nanorods based nanodevices have potential applications in electronics and optoelectronics. This paper describes the fabrication of GaN nanorods using Ni nanomasking and reactive ion etching. The morphology of GaN nanorods was studied by field emission scanning electron microscopy. The optical properties of GaN nanorods were studied by Cathodoluminescence (CL) spectroscopy. CL results revealed the existence of characteristic band-edge luminescence and yellow band luminescence.http://jnep.sumdu.edu.ua/download/numbers/2013/2/articles/jnep_2013_V5_02001.pdfGaNNanorodNanomaskingReactive-ion etchingCathodoluminescenceBand-edge luminescenceYellow band luminescenc
spellingShingle Ashutosh Kumar
Michael Latzel
C. Tessarek
S. Christiansen
R. Singh
Characterization of GaN Nanorods Fabricated Using Ni Nanomasking and Reactive Ion Etching: A Top-Down Approach
Журнал нано- та електронної фізики
GaN
Nanorod
Nanomasking
Reactive-ion etching
Cathodoluminescence
Band-edge luminescence
Yellow band luminescenc
title Characterization of GaN Nanorods Fabricated Using Ni Nanomasking and Reactive Ion Etching: A Top-Down Approach
title_full Characterization of GaN Nanorods Fabricated Using Ni Nanomasking and Reactive Ion Etching: A Top-Down Approach
title_fullStr Characterization of GaN Nanorods Fabricated Using Ni Nanomasking and Reactive Ion Etching: A Top-Down Approach
title_full_unstemmed Characterization of GaN Nanorods Fabricated Using Ni Nanomasking and Reactive Ion Etching: A Top-Down Approach
title_short Characterization of GaN Nanorods Fabricated Using Ni Nanomasking and Reactive Ion Etching: A Top-Down Approach
title_sort characterization of gan nanorods fabricated using ni nanomasking and reactive ion etching a top down approach
topic GaN
Nanorod
Nanomasking
Reactive-ion etching
Cathodoluminescence
Band-edge luminescence
Yellow band luminescenc
url http://jnep.sumdu.edu.ua/download/numbers/2013/2/articles/jnep_2013_V5_02001.pdf
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AT schristiansen characterizationofgannanorodsfabricatedusingninanomaskingandreactiveionetchingatopdownapproach
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