Achieving a large field-induced polarization and energy density in BaTiO3 films sputter-deposited on Si at 200 °C via a buffer-layer technique

Achieving a large field-induced polarization and energy density in BaTiO3 films sputter-deposited on Si at 200 °C via a buffer-layer technique

Ferroelectric oxide films with a large field-induced polarization can be used in dielectric capacitors for charge or energy storage in microelectronic systems and hence have attracted intense research interest. A high processing temperature is usually required to produce a well-crystallized polar ph...

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Bibliographic Details
Main Authors: Chao Liu, Jun Ouyang, Yuyao Zhao, Hanfei Zhu, Hongbu Cheng, Zhenyan Liang, Li Wang
Format: Article
Language:English
Published: Tsinghua University Press 2025-03-01
Series:Journal of Advanced Ceramics
Subjects:
ferroelectric oxide films
field-induced polarization
batio3
lanio3
energy density
Online Access:https://www.sciopen.com/article/10.26599/JAC.2025.9221038
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