Finite element-based nonlinear dynamic optimization of nanomechanical resonators
Abstract Nonlinear dynamic simulations of mechanical resonators have been facilitated by the advent of computational techniques that generate nonlinear reduced order models (ROMs) using the finite element (FE) method. However, designing devices with specific nonlinear characteristics remains ineffic...
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| Format: | Article |
| Language: | English |
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Nature Publishing Group
2025-01-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-024-00854-7 |
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| author | Zichao Li Farbod Alijani Ali Sarafraz Minxing Xu Richard A. Norte Alejandro M. Aragón Peter G. Steeneken |
| author_facet | Zichao Li Farbod Alijani Ali Sarafraz Minxing Xu Richard A. Norte Alejandro M. Aragón Peter G. Steeneken |
| author_sort | Zichao Li |
| collection | DOAJ |
| description | Abstract Nonlinear dynamic simulations of mechanical resonators have been facilitated by the advent of computational techniques that generate nonlinear reduced order models (ROMs) using the finite element (FE) method. However, designing devices with specific nonlinear characteristics remains inefficient since it requires manual adjustment of the design parameters and can result in suboptimal designs. Here, we integrate an FE-based nonlinear ROM technique with a derivative-free optimization algorithm to enable the design of nonlinear mechanical resonators. The resulting methodology is used to optimize the support design of high-stress nanomechanical Si3N4 string resonators, in the presence of conflicting objectives such as simultaneous enhancement of Q-factor and nonlinear Duffing constant. To that end, we generate Pareto frontiers that highlight the trade-offs between optimization objectives and validate the results both numerically and experimentally. To further demonstrate the capability of multi-objective optimization for practical design challenges, we simultaneously optimize the design of nanoresonators for three key figure-of-merits in resonant sensing: power consumption, sensitivity and response time. The presented methodology can facilitate and accelerate designing (nano) mechanical resonators with optimized performance for a wide variety of applications. |
| format | Article |
| id | doaj-art-64fc1782307c41458daecf80de9a078e |
| institution | Kabale University |
| issn | 2055-7434 |
| language | English |
| publishDate | 2025-01-01 |
| publisher | Nature Publishing Group |
| record_format | Article |
| series | Microsystems & Nanoengineering |
| spelling | doaj-art-64fc1782307c41458daecf80de9a078e2025-01-26T12:38:23ZengNature Publishing GroupMicrosystems & Nanoengineering2055-74342025-01-0111111010.1038/s41378-024-00854-7Finite element-based nonlinear dynamic optimization of nanomechanical resonatorsZichao Li0Farbod Alijani1Ali Sarafraz2Minxing Xu3Richard A. Norte4Alejandro M. Aragón5Peter G. Steeneken6Faculty of Mechanical Engineering, Department of Precision and Microsystems Engineering, Delft University of TechnologyFaculty of Mechanical Engineering, Department of Precision and Microsystems Engineering, Delft University of TechnologyFaculty of Mechanical Engineering, Department of Precision and Microsystems Engineering, Delft University of TechnologyFaculty of Mechanical Engineering, Department of Precision and Microsystems Engineering, Delft University of TechnologyFaculty of Mechanical Engineering, Department of Precision and Microsystems Engineering, Delft University of TechnologyFaculty of Mechanical Engineering, Department of Precision and Microsystems Engineering, Delft University of TechnologyFaculty of Mechanical Engineering, Department of Precision and Microsystems Engineering, Delft University of TechnologyAbstract Nonlinear dynamic simulations of mechanical resonators have been facilitated by the advent of computational techniques that generate nonlinear reduced order models (ROMs) using the finite element (FE) method. However, designing devices with specific nonlinear characteristics remains inefficient since it requires manual adjustment of the design parameters and can result in suboptimal designs. Here, we integrate an FE-based nonlinear ROM technique with a derivative-free optimization algorithm to enable the design of nonlinear mechanical resonators. The resulting methodology is used to optimize the support design of high-stress nanomechanical Si3N4 string resonators, in the presence of conflicting objectives such as simultaneous enhancement of Q-factor and nonlinear Duffing constant. To that end, we generate Pareto frontiers that highlight the trade-offs between optimization objectives and validate the results both numerically and experimentally. To further demonstrate the capability of multi-objective optimization for practical design challenges, we simultaneously optimize the design of nanoresonators for three key figure-of-merits in resonant sensing: power consumption, sensitivity and response time. The presented methodology can facilitate and accelerate designing (nano) mechanical resonators with optimized performance for a wide variety of applications.https://doi.org/10.1038/s41378-024-00854-7 |
| spellingShingle | Zichao Li Farbod Alijani Ali Sarafraz Minxing Xu Richard A. Norte Alejandro M. Aragón Peter G. Steeneken Finite element-based nonlinear dynamic optimization of nanomechanical resonators Microsystems & Nanoengineering |
| title | Finite element-based nonlinear dynamic optimization of nanomechanical resonators |
| title_full | Finite element-based nonlinear dynamic optimization of nanomechanical resonators |
| title_fullStr | Finite element-based nonlinear dynamic optimization of nanomechanical resonators |
| title_full_unstemmed | Finite element-based nonlinear dynamic optimization of nanomechanical resonators |
| title_short | Finite element-based nonlinear dynamic optimization of nanomechanical resonators |
| title_sort | finite element based nonlinear dynamic optimization of nanomechanical resonators |
| url | https://doi.org/10.1038/s41378-024-00854-7 |
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