Improving the Performance of Charge Trapping Memtransistor as Synaptic Device by Ti-Doped HfO<sub>2</sub>

In this work, we improved the performance of germanium (Ge) channel Charge Trapping MemTransistors (CTMTs) as synaptic device by using Ti-doped HfO<sub>2</sub> as charge trapping layer (CTL). We manipulated the amount of Ti dopant within the HfO<sub>2</sub> CTL to perform the...

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Main Authors: Yu-Che Chou, Wan-Hsuan Chung, Chien-Wei Tsai, Chin-Ya Yi, Chao-Hsin Chien
Format: Article
Language:English
Published: IEEE 2021-01-01
Series:IEEE Journal of the Electron Devices Society
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Online Access:https://ieeexplore.ieee.org/document/9296335/
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author Yu-Che Chou
Wan-Hsuan Chung
Chien-Wei Tsai
Chin-Ya Yi
Chao-Hsin Chien
author_facet Yu-Che Chou
Wan-Hsuan Chung
Chien-Wei Tsai
Chin-Ya Yi
Chao-Hsin Chien
author_sort Yu-Che Chou
collection DOAJ
description In this work, we improved the performance of germanium (Ge) channel Charge Trapping MemTransistors (CTMTs) as synaptic device by using Ti-doped HfO<sub>2</sub> as charge trapping layer (CTL). We manipulated the amount of Ti dopant within the HfO<sub>2</sub> CTL to perform the band engineering by varying the Hf/Ti cycle ratio in atomic layer deposition (ALD). The content of Ti was quantified and the energy band structures of the gate stack was constructed with the aid of transmission electron microscope (TEM) images and X-ray photoelectron spectroscopy (XPS) analysis. We then fabricated the charge trapping capacitors and characterized their memory characteristics such as memory windows. By the implementation of amphoteric trap model, thermal activated electron retention model and advanced charge decay model, the trap distribution of the CTL was extracted. Finally, we fabricated the CTMTs with Ti-doped HfO<sub>2</sub> as the CTL and characterized their performance as synaptic device such as nonlinearity of depression and potentiation and also conductance on/off ratio. We used NeuroSim simulator with multilayer perceptron and convolutional neural network models to evaluate the pattern recognition accuracy of neural network hardware accelerator using CTMTs as synaptic devices and benchmarked the performance of our CTMT with those of other types of synaptic devices.
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publishDate 2021-01-01
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series IEEE Journal of the Electron Devices Society
spelling doaj-art-62e12bba226f495b903b4fba2b4e982c2025-08-25T23:00:22ZengIEEEIEEE Journal of the Electron Devices Society2168-67342021-01-01913714310.1109/JEDS.2020.30451949296335Improving the Performance of Charge Trapping Memtransistor as Synaptic Device by Ti-Doped HfO<sub>2</sub>Yu-Che Chou0https://orcid.org/0000-0002-7038-6768Wan-Hsuan Chung1https://orcid.org/0000-0002-7370-600XChien-Wei Tsai2Chin-Ya Yi3Chao-Hsin Chien4https://orcid.org/0000-0002-6698-6752Institute of Electronics, National Chiao Tung University, Hsinchu, TaiwanInstitute of Electronics, National Chiao Tung University, Hsinchu, TaiwanInstitute of Electronics, National Chiao Tung University, Hsinchu, TaiwanInstitute of Electronics, National Chiao Tung University, Hsinchu, TaiwanInstitute of Electronics, National Chiao Tung University, Hsinchu, TaiwanIn this work, we improved the performance of germanium (Ge) channel Charge Trapping MemTransistors (CTMTs) as synaptic device by using Ti-doped HfO<sub>2</sub> as charge trapping layer (CTL). We manipulated the amount of Ti dopant within the HfO<sub>2</sub> CTL to perform the band engineering by varying the Hf/Ti cycle ratio in atomic layer deposition (ALD). The content of Ti was quantified and the energy band structures of the gate stack was constructed with the aid of transmission electron microscope (TEM) images and X-ray photoelectron spectroscopy (XPS) analysis. We then fabricated the charge trapping capacitors and characterized their memory characteristics such as memory windows. By the implementation of amphoteric trap model, thermal activated electron retention model and advanced charge decay model, the trap distribution of the CTL was extracted. Finally, we fabricated the CTMTs with Ti-doped HfO<sub>2</sub> as the CTL and characterized their performance as synaptic device such as nonlinearity of depression and potentiation and also conductance on/off ratio. We used NeuroSim simulator with multilayer perceptron and convolutional neural network models to evaluate the pattern recognition accuracy of neural network hardware accelerator using CTMTs as synaptic devices and benchmarked the performance of our CTMT with those of other types of synaptic devices.https://ieeexplore.ieee.org/document/9296335/Germaniumdielectric materialsneural network hardwareanalog memoriesartificial intelligenceMOSFETs
spellingShingle Yu-Che Chou
Wan-Hsuan Chung
Chien-Wei Tsai
Chin-Ya Yi
Chao-Hsin Chien
Improving the Performance of Charge Trapping Memtransistor as Synaptic Device by Ti-Doped HfO<sub>2</sub>
IEEE Journal of the Electron Devices Society
Germanium
dielectric materials
neural network hardware
analog memories
artificial intelligence
MOSFETs
title Improving the Performance of Charge Trapping Memtransistor as Synaptic Device by Ti-Doped HfO<sub>2</sub>
title_full Improving the Performance of Charge Trapping Memtransistor as Synaptic Device by Ti-Doped HfO<sub>2</sub>
title_fullStr Improving the Performance of Charge Trapping Memtransistor as Synaptic Device by Ti-Doped HfO<sub>2</sub>
title_full_unstemmed Improving the Performance of Charge Trapping Memtransistor as Synaptic Device by Ti-Doped HfO<sub>2</sub>
title_short Improving the Performance of Charge Trapping Memtransistor as Synaptic Device by Ti-Doped HfO<sub>2</sub>
title_sort improving the performance of charge trapping memtransistor as synaptic device by ti doped hfo sub 2 sub
topic Germanium
dielectric materials
neural network hardware
analog memories
artificial intelligence
MOSFETs
url https://ieeexplore.ieee.org/document/9296335/
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