Nanoimprint crystalithography for organic semiconductors

Abstract Organic semiconductor crystals (OSCs) offer mechanical flexibility, high carrier mobility, and tunable electronic structures, making them promising for optoelectronic and photonic applications. However, traditional lithographic techniques damage OSCs due to high-energy beams or solvents, le...

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Main Authors: Shun-Xin Li, Guan-Yao Huang, Hong Xia, Tairan Fu, Xiao-Jie Wang, Xin Zeng, Xinfeng Liu, Yan-Hao Yu, Qi-Dai Chen, Linhan Lin, Hong-Bo Sun
Format: Article
Language:English
Published: Nature Portfolio 2025-04-01
Series:Nature Communications
Online Access:https://doi.org/10.1038/s41467-025-58934-9
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author Shun-Xin Li
Guan-Yao Huang
Hong Xia
Tairan Fu
Xiao-Jie Wang
Xin Zeng
Xinfeng Liu
Yan-Hao Yu
Qi-Dai Chen
Linhan Lin
Hong-Bo Sun
author_facet Shun-Xin Li
Guan-Yao Huang
Hong Xia
Tairan Fu
Xiao-Jie Wang
Xin Zeng
Xinfeng Liu
Yan-Hao Yu
Qi-Dai Chen
Linhan Lin
Hong-Bo Sun
author_sort Shun-Xin Li
collection DOAJ
description Abstract Organic semiconductor crystals (OSCs) offer mechanical flexibility, high carrier mobility, and tunable electronic structures, making them promising for optoelectronic and photonic applications. However, traditional lithographic techniques damage OSCs due to high-energy beams or solvents, leading to high defect densities, poor uniformity, and significant device-to-device variation. Existing methods also struggle to eliminate residual layers while forming independent, complex two-dimensional patterns. A chemical-free nanoimprint crystallography (NICL) method is introduced to overcome these challenges by balancing residual-layer-free nanoimprinting with the fabrication of independent, complex 2D patterns. In situ control of crystallization kinetics via temperature gradient adjustment yields OSC nanostructures with low defect densities and good uniformity. Patterning of various OSCs over a range of feature sizes is demonstrated. The patterned OSCs exhibit good lasing performance and low device-to-device variation (as low as 2%), indicating that NICL is a promising approach for fabricating high-performance, uniform OSC-based devices.
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issn 2041-1723
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publishDate 2025-04-01
publisher Nature Portfolio
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series Nature Communications
spelling doaj-art-62a858405c5d4e83a3c9a77ccd2183e72025-08-20T02:55:27ZengNature PortfolioNature Communications2041-17232025-04-011611910.1038/s41467-025-58934-9Nanoimprint crystalithography for organic semiconductorsShun-Xin Li0Guan-Yao Huang1Hong Xia2Tairan Fu3Xiao-Jie Wang4Xin Zeng5Xinfeng Liu6Yan-Hao Yu7Qi-Dai Chen8Linhan Lin9Hong-Bo Sun10State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin UniversityBeijing Institute of Technology ZhuhaiState Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin UniversityKey Laboratory for Thermal Science and Power Engineering of Ministry of Education, Beijing Key Laboratory of CO2 Utilization and Reduction Technology, Department of Energy and Power Engineering, Tsinghua UniversityState Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua UniversityCAS Key Laboratory of Standardization and Measurement for Nanotechnology, National Center for Nanoscience and TechnologyCAS Key Laboratory of Standardization and Measurement for Nanotechnology, National Center for Nanoscience and TechnologyState Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin UniversityState Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin UniversityState Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua UniversityState Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin UniversityAbstract Organic semiconductor crystals (OSCs) offer mechanical flexibility, high carrier mobility, and tunable electronic structures, making them promising for optoelectronic and photonic applications. However, traditional lithographic techniques damage OSCs due to high-energy beams or solvents, leading to high defect densities, poor uniformity, and significant device-to-device variation. Existing methods also struggle to eliminate residual layers while forming independent, complex two-dimensional patterns. A chemical-free nanoimprint crystallography (NICL) method is introduced to overcome these challenges by balancing residual-layer-free nanoimprinting with the fabrication of independent, complex 2D patterns. In situ control of crystallization kinetics via temperature gradient adjustment yields OSC nanostructures with low defect densities and good uniformity. Patterning of various OSCs over a range of feature sizes is demonstrated. The patterned OSCs exhibit good lasing performance and low device-to-device variation (as low as 2%), indicating that NICL is a promising approach for fabricating high-performance, uniform OSC-based devices.https://doi.org/10.1038/s41467-025-58934-9
spellingShingle Shun-Xin Li
Guan-Yao Huang
Hong Xia
Tairan Fu
Xiao-Jie Wang
Xin Zeng
Xinfeng Liu
Yan-Hao Yu
Qi-Dai Chen
Linhan Lin
Hong-Bo Sun
Nanoimprint crystalithography for organic semiconductors
Nature Communications
title Nanoimprint crystalithography for organic semiconductors
title_full Nanoimprint crystalithography for organic semiconductors
title_fullStr Nanoimprint crystalithography for organic semiconductors
title_full_unstemmed Nanoimprint crystalithography for organic semiconductors
title_short Nanoimprint crystalithography for organic semiconductors
title_sort nanoimprint crystalithography for organic semiconductors
url https://doi.org/10.1038/s41467-025-58934-9
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