DESIGN OF A TWO-AXIS MEMS SENSOR FOR MEASURING THE FORCE AND TORQUE WITH COMB STRUCTURE
Based on the micro-electro-mechanical systems（MEMS） technology,the chip structure of a two-axis force sensor with comb structure was designed.Silicon force sensitive structure converted the faint mechanical signals into measurable electrical signals.After finite element model was established,the str...
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| Format: | Article |
| Language: | zho |
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Editorial Office of Journal of Mechanical Strength
2018-01-01
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| Series: | Jixie qiangdu |
| Subjects: | |
| Online Access: | http://www.jxqd.net.cn/thesisDetails#10.16579/j.issn.1001.9669.2018.04.016 |
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| _version_ | 1841535541132132352 |
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| author | WANG ShuQin WANG BiDou LV DanHui YANG Wei SUN HaiXuan |
| author_facet | WANG ShuQin WANG BiDou LV DanHui YANG Wei SUN HaiXuan |
| author_sort | WANG ShuQin |
| collection | DOAJ |
| description | Based on the micro-electro-mechanical systems（MEMS） technology,the chip structure of a two-axis force sensor with comb structure was designed.Silicon force sensitive structure converted the faint mechanical signals into measurable electrical signals.After finite element model was established,the structure and electrical properties of the sensor were analyzed.The corresponding relation between the mechanical signals and the electrical signal was obtained.The mode analysis and harmonic response analysis were performed for the model.The natural frequency of the structure and the harmonic response frequency both are verified that far away from the operating frequency of the system.The work stability and measurement accuracy of the chip are guaranteed.The resolutions of force and moment of the sensor chip are 2.85 μm and 0.0382 μN·m,respectively.The linearity of the signal conversion reached 0.999 6 and 0.999 9.The first and second order modal natural frequency is783.28 Hz and 1 294.3 Hz and harmonic response frequency is 770 Hz.Simulation results meet the requirement of performance specification. |
| format | Article |
| id | doaj-art-625ad8fbe2864b13ab412c4f3ed24105 |
| institution | Kabale University |
| issn | 1001-9669 |
| language | zho |
| publishDate | 2018-01-01 |
| publisher | Editorial Office of Journal of Mechanical Strength |
| record_format | Article |
| series | Jixie qiangdu |
| spelling | doaj-art-625ad8fbe2864b13ab412c4f3ed241052025-01-15T02:31:34ZzhoEditorial Office of Journal of Mechanical StrengthJixie qiangdu1001-96692018-01-014085786230602143DESIGN OF A TWO-AXIS MEMS SENSOR FOR MEASURING THE FORCE AND TORQUE WITH COMB STRUCTUREWANG ShuQinWANG BiDouLV DanHuiYANG WeiSUN HaiXuanBased on the micro-electro-mechanical systems（MEMS） technology,the chip structure of a two-axis force sensor with comb structure was designed.Silicon force sensitive structure converted the faint mechanical signals into measurable electrical signals.After finite element model was established,the structure and electrical properties of the sensor were analyzed.The corresponding relation between the mechanical signals and the electrical signal was obtained.The mode analysis and harmonic response analysis were performed for the model.The natural frequency of the structure and the harmonic response frequency both are verified that far away from the operating frequency of the system.The work stability and measurement accuracy of the chip are guaranteed.The resolutions of force and moment of the sensor chip are 2.85 μm and 0.0382 μN·m,respectively.The linearity of the signal conversion reached 0.999 6 and 0.999 9.The first and second order modal natural frequency is783.28 Hz and 1 294.3 Hz and harmonic response frequency is 770 Hz.Simulation results meet the requirement of performance specification.http://www.jxqd.net.cn/thesisDetails#10.16579/j.issn.1001.9669.2018.04.016Micro-electromechanical systems（MEMS）Force sensorTwo-axisComb structurePhysical design |
| spellingShingle | WANG ShuQin WANG BiDou LV DanHui YANG Wei SUN HaiXuan DESIGN OF A TWO-AXIS MEMS SENSOR FOR MEASURING THE FORCE AND TORQUE WITH COMB STRUCTURE Jixie qiangdu Micro-electromechanical systems（MEMS） Force sensor Two-axis Comb structure Physical design |
| title | DESIGN OF A TWO-AXIS MEMS SENSOR FOR MEASURING THE FORCE AND TORQUE WITH COMB STRUCTURE |
| title_full | DESIGN OF A TWO-AXIS MEMS SENSOR FOR MEASURING THE FORCE AND TORQUE WITH COMB STRUCTURE |
| title_fullStr | DESIGN OF A TWO-AXIS MEMS SENSOR FOR MEASURING THE FORCE AND TORQUE WITH COMB STRUCTURE |
| title_full_unstemmed | DESIGN OF A TWO-AXIS MEMS SENSOR FOR MEASURING THE FORCE AND TORQUE WITH COMB STRUCTURE |
| title_short | DESIGN OF A TWO-AXIS MEMS SENSOR FOR MEASURING THE FORCE AND TORQUE WITH COMB STRUCTURE |
| title_sort | design of a two axis mems sensor for measuring the force and torque with comb structure |
| topic | Micro-electromechanical systems（MEMS） Force sensor Two-axis Comb structure Physical design |
| url | http://www.jxqd.net.cn/thesisDetails#10.16579/j.issn.1001.9669.2018.04.016 |
| work_keys_str_mv | AT wangshuqin designofatwoaxismemssensorformeasuringtheforceandtorquewithcombstructure AT wangbidou designofatwoaxismemssensorformeasuringtheforceandtorquewithcombstructure AT lvdanhui designofatwoaxismemssensorformeasuringtheforceandtorquewithcombstructure AT yangwei designofatwoaxismemssensorformeasuringtheforceandtorquewithcombstructure AT sunhaixuan designofatwoaxismemssensorformeasuringtheforceandtorquewithcombstructure |