The Multifractal Investigation of Surface Microgeometry of (Ti-Hf-Zr-V-Nb)N Nitride Coatings
The qualitative investigation of the morphology of (Ti-Hf-Zr-V-Nb) N nitride coatings depending on the bias potential of the substrate was performed. The two-dimensional multifractal fluctuation analysis was used for the quantitative analysis of the changes in microscopic irregularities. The calcula...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Sumy State University
2014-11-01
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| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2014/4/articles/jnep_2014_V6_04018.pdf |
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| Summary: | The qualitative investigation of the morphology of (Ti-Hf-Zr-V-Nb) N nitride coatings depending on the bias potential of the substrate was performed. The two-dimensional multifractal fluctuation analysis was used for the quantitative analysis of the changes in microscopic irregularities. The calculation of statistical parameters (generalized Hurst exponent and multifractal spectrum) indicates compliance with theoretical calculations and experimental studies, namely, smoothing of the coating surface with the increasing ion energy. |
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| ISSN: | 2077-6772 |