Silicon-based MEMS/NEMS empowered by graphene: a scheme for large tunability and functionality
Abstract Integration of graphene in silicon-based micro-/nanoelectromechanical systems (MEMS/NEMS) marries the robustness of silicon-based materials with the exceptional physical properties of graphene, drastically enhancing the system’s regulation performance which now is key for many advanced appl...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2025-06-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-025-00960-0 |
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