SURFACE MORPHOLOGY OF SPUTTERED TITANIUM-ALUMINUM-NITRIDE COATINGS
A study on the surface morphology of sputtered TiAlN coatings is presented. The coatings were deposited by DC magnetron sputtering on tungsten carbide insert tools. The surface morphology was characterized by using Atomic Force Microscopy (AFM), and the surface roughness was indicated by RMS roughne...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Universitas Negeri Jakarta
2020-04-01
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| Series: | Spektra: Jurnal Fisika dan Aplikasinya |
| Subjects: | |
| Online Access: | https://journal.unj.ac.id/unj/index.php/spektra/article/view/14489 |
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