Estimating viscosities of semiconductor-manufacturing gases
Semiconductor manufacturing demands an accurate delivery of gases to the process chamber. To achieve this, accurate gas viscosities are needed. Hence, this paper compares viscosity models applied to pure gases and operating conditions relevant to semiconductor manufacturing and develops a method to...
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2025-02-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/6.0004312 |
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